Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However, PMUT arrays have so far failed to combine th...

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Bibliographic Details
Main Authors: Xu-Bo Wang, Le-Ming He, You-Cao Ma, Wen-Juan Liu, Wei-Jiang Xu, Jun-Yan Ren, Antoine Riaud, Jia Zhou
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Sensors
Subjects:
high-frequency
wide bandwidth
PMUT
PZT
PDMS
micromachining
Online Access:https://www.mdpi.com/1424-8220/21/5/1823

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