Hysteresis Characteristics and MPI Compensation of Two-Dimensional Piezoelectric Positioning Stage

Hysteresis Characteristics and MPI Compensation of Two-Dimensional Piezoelectric Positioning Stage

Piezoelectric positioning stage is the core component of precision positioning system and advanced instrument. Its hysteresis characteristics, especially rate-dependent characteristics, are the main factors affecting the positioning or control accuracy. The multi-slope Prandtl–Ishlinskii (MPI) based...

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Bibliographic Details
Main Authors: Wanqiang Wang, Jiaqi Zhang, Ming Xu, Guojin Chen
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Micromachines
Subjects:
piezoelectric positioning stage
hysteresis
MPI
compensation
fitting coefficient
Online Access:https://www.mdpi.com/2072-666X/13/2/321

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