All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss
Compared to the widely used compound semiconductor photoelectric sensors, all-silicon photoelectric sensors have the advantage of easy mass production because they are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. In this paper, we propose an all-silicon p...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-03-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/13/5/914 |
| _version_ | 1827752365642481664 |
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| author | Yu Tang Qian Luo Yuxing Chen Kaikai Xu |
| author_facet | Yu Tang Qian Luo Yuxing Chen Kaikai Xu |
| author_sort | Yu Tang |
| collection | DOAJ |
| description | Compared to the widely used compound semiconductor photoelectric sensors, all-silicon photoelectric sensors have the advantage of easy mass production because they are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. In this paper, we propose an all-silicon photoelectric biosensor with a simple process and that is integrated, miniature, and with low loss. This biosensor is based on monolithic integration technology, and its light source is a PN junction cascaded polysilicon nanostructure. The detection device utilizes a simple refractive index sensing method. According to our simulation, when the refractive index of the detected material is more than 1.52, evanescent wave intensity decreases with the growth of the refractive index. Thus, refractive index sensing can be achieved. Moreover, it was also shown that, compared to a slab waveguide, the embedded waveguide designed in this paper has a lower loss. With these features, our all-silicon photoelectric biosensor (ASPB) demonstrates its potential in the application of handheld biosensors. |
| first_indexed | 2024-03-11T07:15:21Z |
| format | Article |
| id | doaj.art-3458735b80594864b64f82c02fecc265 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-11T07:15:21Z |
| publishDate | 2023-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-3458735b80594864b64f82c02fecc2652023-11-17T08:18:17ZengMDPI AGNanomaterials2079-49912023-03-0113591410.3390/nano13050914All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low LossYu Tang0Qian Luo1Yuxing Chen2Kaikai Xu3State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, ChinaCompared to the widely used compound semiconductor photoelectric sensors, all-silicon photoelectric sensors have the advantage of easy mass production because they are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. In this paper, we propose an all-silicon photoelectric biosensor with a simple process and that is integrated, miniature, and with low loss. This biosensor is based on monolithic integration technology, and its light source is a PN junction cascaded polysilicon nanostructure. The detection device utilizes a simple refractive index sensing method. According to our simulation, when the refractive index of the detected material is more than 1.52, evanescent wave intensity decreases with the growth of the refractive index. Thus, refractive index sensing can be achieved. Moreover, it was also shown that, compared to a slab waveguide, the embedded waveguide designed in this paper has a lower loss. With these features, our all-silicon photoelectric biosensor (ASPB) demonstrates its potential in the application of handheld biosensors.https://www.mdpi.com/2079-4991/13/5/914PN junction cascade light sourceevanescent wavesilicon nitride waveguidemonolithic integrated |
| spellingShingle | Yu Tang Qian Luo Yuxing Chen Kaikai Xu All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss Nanomaterials PN junction cascade light source evanescent wave silicon nitride waveguide monolithic integrated |
| title | All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss |
| title_full | All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss |
| title_fullStr | All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss |
| title_full_unstemmed | All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss |
| title_short | All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss |
| title_sort | all silicon photoelectric biosensor on chip based on silicon nitride waveguide with low loss |
| topic | PN junction cascade light source evanescent wave silicon nitride waveguide monolithic integrated |
| url | https://www.mdpi.com/2079-4991/13/5/914 |
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