All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss

All-Silicon Photoelectric Biosensor on Chip Based on Silicon Nitride Waveguide with Low Loss

Compared to the widely used compound semiconductor photoelectric sensors, all-silicon photoelectric sensors have the advantage of easy mass production because they are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. In this paper, we propose an all-silicon p...

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Bibliographic Details
Main Authors: Yu Tang, Qian Luo, Yuxing Chen, Kaikai Xu
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Nanomaterials
Subjects:
PN junction cascade light source
evanescent wave
silicon nitride waveguide
monolithic integrated
Online Access:https://www.mdpi.com/2079-4991/13/5/914

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