Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film
This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO<sub>3</sub> film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating f...
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| Format: | Article |
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MDPI AG
2021-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/9/1039 |
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| author | Zhen-Hui Qin Shu-Mao Wu Yong Wang Kang-Fu Liu Tao Wu Si-Yuan Yu Yan-Feng Chen |
| author_facet | Zhen-Hui Qin Shu-Mao Wu Yong Wang Kang-Fu Liu Tao Wu Si-Yuan Yu Yan-Feng Chen |
| author_sort | Zhen-Hui Qin |
| collection | DOAJ |
| description | This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO<sub>3</sub> film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating frequency over 5 GHz with an electromechanical coupling coefficient exceeding 50%. Compared with previously proposed YBAR with suspended structure, the proposed SM-YBAR can effectively suppress unwanted spurious modes with only a slight loss of the electromechanical coupling coefficient. The SM-YABR also provides better device stability, possible low-temperature drift coefficient, and a more convenient and mature device processing. It has the potential to meet the multiple requirements for the next generation signal processing devices in terms of high frequency, large bandwidth, stability, and low cost, etc. |
| first_indexed | 2024-03-10T07:25:51Z |
| format | Article |
| id | doaj.art-3461b18abe7845d08a13f3fd863270d2 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T07:25:51Z |
| publishDate | 2021-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-3461b18abe7845d08a13f3fd863270d22023-11-22T14:15:39ZengMDPI AGMicromachines2072-666X2021-08-01129103910.3390/mi12091039Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-FilmZhen-Hui Qin0Shu-Mao Wu1Yong Wang2Kang-Fu Liu3Tao Wu4Si-Yuan Yu5Yan-Feng Chen6National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, ChinaNational Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, ChinaState Key Lab of Crystal Materials, Shandong University, Jinan 250100, ChinaSchool of Information Science and Technology, ShanghaiTech University, Shanghai 201210, ChinaSchool of Information Science and Technology, ShanghaiTech University, Shanghai 201210, ChinaNational Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, ChinaNational Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, ChinaThis paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO<sub>3</sub> film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating frequency over 5 GHz with an electromechanical coupling coefficient exceeding 50%. Compared with previously proposed YBAR with suspended structure, the proposed SM-YBAR can effectively suppress unwanted spurious modes with only a slight loss of the electromechanical coupling coefficient. The SM-YABR also provides better device stability, possible low-temperature drift coefficient, and a more convenient and mature device processing. It has the potential to meet the multiple requirements for the next generation signal processing devices in terms of high frequency, large bandwidth, stability, and low cost, etc.https://www.mdpi.com/2072-666X/12/9/1039YBARbulk acoustic resonator (BAR)solid mounted resonator (SMR)LiNbO<sub>3</sub> film |
| spellingShingle | Zhen-Hui Qin Shu-Mao Wu Yong Wang Kang-Fu Liu Tao Wu Si-Yuan Yu Yan-Feng Chen Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film Micromachines YBAR bulk acoustic resonator (BAR) solid mounted resonator (SMR) LiNbO<sub>3</sub> film |
| title | Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film |
| title_full | Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film |
| title_fullStr | Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film |
| title_full_unstemmed | Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film |
| title_short | Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film |
| title_sort | solidly mounted longitudinally excited shear wave resonator ybar based on lithium niobate thin film |
| topic | YBAR bulk acoustic resonator (BAR) solid mounted resonator (SMR) LiNbO<sub>3</sub> film |
| url | https://www.mdpi.com/2072-666X/12/9/1039 |
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