Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film

Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film

This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO<sub>3</sub> film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating f...

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Bibliographic Details
Main Authors: Zhen-Hui Qin, Shu-Mao Wu, Yong Wang, Kang-Fu Liu, Tao Wu, Si-Yuan Yu, Yan-Feng Chen
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Micromachines
Subjects:
YBAR
bulk acoustic resonator (BAR)
solid mounted resonator (SMR)
LiNbO<sub>3</sub> film
Online Access:https://www.mdpi.com/2072-666X/12/9/1039

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