DLC-Si protective coatings for polycarbonates
In this work, a-C:H:Si (DLC-Si) films were produced onto crystalline silicon and polycarbonate substrates by the rf-PACVD technique from gaseous mixtures of CH4 + SiH4 and C2H2 + SiH4. The effects of self-bias and gas composition upon mechanical and optical properties of the films were investigated....
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| Format: | Article |
| Language: | English |
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Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)
2003-01-01
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| Series: | Materials Research |
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| Online Access: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100005 |
| _version_ | 1818561877798551552 |
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| author | Damasceno J.C. Camargo Jr. S.S. Cremona M. |
| author_facet | Damasceno J.C. Camargo Jr. S.S. Cremona M. |
| author_sort | Damasceno J.C. |
| collection | DOAJ |
| description | In this work, a-C:H:Si (DLC-Si) films were produced onto crystalline silicon and polycarbonate substrates by the rf-PACVD technique from gaseous mixtures of CH4 + SiH4 and C2H2 + SiH4. The effects of self-bias and gas composition upon mechanical and optical properties of the films were investigated. Micro-hardness, residual stress, surface roughness and refractive index measurements were employed for characterization. By incorporating low concentrations of silicon and by exploring the more favorable conditions for the rf-PACVD deposition technique, highly adherent DLC-Si thin films were produced with reduced internal stresses (lower than 1 GPa), high hardness (around 20 GPa) and high deposition rates (up to 10 µm/h). Results that show the technological viability of this material for application as protective coatings for polycarbonates are also discussed. |
| first_indexed | 2024-12-14T00:56:28Z |
| format | Article |
| id | doaj.art-347b8206a17d4751bcc675b5c801be0f |
| institution | Directory Open Access Journal |
| issn | 1516-1439 |
| language | English |
| last_indexed | 2024-12-14T00:56:28Z |
| publishDate | 2003-01-01 |
| publisher | Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) |
| record_format | Article |
| series | Materials Research |
| spelling | doaj.art-347b8206a17d4751bcc675b5c801be0f2022-12-21T23:23:32ZengAssociação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)Materials Research1516-14392003-01-01611923DLC-Si protective coatings for polycarbonatesDamasceno J.C.Camargo Jr. S.S.Cremona M.In this work, a-C:H:Si (DLC-Si) films were produced onto crystalline silicon and polycarbonate substrates by the rf-PACVD technique from gaseous mixtures of CH4 + SiH4 and C2H2 + SiH4. The effects of self-bias and gas composition upon mechanical and optical properties of the films were investigated. Micro-hardness, residual stress, surface roughness and refractive index measurements were employed for characterization. By incorporating low concentrations of silicon and by exploring the more favorable conditions for the rf-PACVD deposition technique, highly adherent DLC-Si thin films were produced with reduced internal stresses (lower than 1 GPa), high hardness (around 20 GPa) and high deposition rates (up to 10 µm/h). Results that show the technological viability of this material for application as protective coatings for polycarbonates are also discussed.http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100005thin filmsDLCchemical vapor depositionsilicon carbidepolycarbonate |
| spellingShingle | Damasceno J.C. Camargo Jr. S.S. Cremona M. DLC-Si protective coatings for polycarbonates Materials Research thin films DLC chemical vapor deposition silicon carbide polycarbonate |
| title | DLC-Si protective coatings for polycarbonates |
| title_full | DLC-Si protective coatings for polycarbonates |
| title_fullStr | DLC-Si protective coatings for polycarbonates |
| title_full_unstemmed | DLC-Si protective coatings for polycarbonates |
| title_short | DLC-Si protective coatings for polycarbonates |
| title_sort | dlc si protective coatings for polycarbonates |
| topic | thin films DLC chemical vapor deposition silicon carbide polycarbonate |
| url | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100005 |
| work_keys_str_mv | AT damascenojc dlcsiprotectivecoatingsforpolycarbonates AT camargojrss dlcsiprotectivecoatingsforpolycarbonates AT cremonam dlcsiprotectivecoatingsforpolycarbonates |