A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch

A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch

In this article, we present the design, fabrication, and characterization of a thermopile infrared sensor array (TISA) pixel. This TISA pixel is composed of a dual-layer p+/n- poly-Si thermopile with a closed membrane and an n-channel metal oxide semiconductor (NMOS) switch. To address the challenge...

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Bibliographic Details
Main Authors: Hongbo Li, Chenchen Zhang, Gaobo Xu, Xuefeng Ding, Yue Ni, Guidong Chen, Dapeng Chen, Na Zhou, Haiyang Mao
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Micromachines
Subjects:
thermopile infrared sensor array (TISA) pixel
dual-layer p+/n- poly-Si
monolithic integration
interleaved MEMS and CMOS processing
NMOS switch
Online Access:https://www.mdpi.com/2072-666X/13/2/258

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