Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator

Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator

Electrothermal actuation is widely employed in MEMS systems, and the electrothermal V-shaped actuator (referred to as EVA) has garnered attention due to its stable output force. However, current EVAs in MEMS face the challenge of limited driving displacement. To investigate the impact of metal coati...

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Bibliographic Details
Main Authors: Fengqi Dai, Shuangjie Liu, Yongping Hao, Fengli Liu
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Machines
Subjects:
electrothermal actuation
V-shaped actuator
silicon EVA
metal coating
driving displacement
mechanical model
Online Access:https://www.mdpi.com/2075-1702/11/7/687

Internet

https://www.mdpi.com/2075-1702/11/7/687

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