Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications
In this paper, a unique hybrid approach to design and synthesize 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures by simultaneous deposition is presented. Pulsed laser deposition (PLD) and RF magnetron sputtering (RFMS) methods are redeveloped into a single tandem system...
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MDPI AG
2023-04-01
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| Online Access: | https://www.mdpi.com/2079-4991/13/8/1345 |
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| author | Joselito Puzon Labis Hamad A. Albrithen Mahmoud Hezam Muhammad Ali Shar Ahmad Algarni Abdulaziz N. Alhazaa Ahmed Mohamed El-Toni Mohammad Abdulaziz Alduraibi |
| author_facet | Joselito Puzon Labis Hamad A. Albrithen Mahmoud Hezam Muhammad Ali Shar Ahmad Algarni Abdulaziz N. Alhazaa Ahmed Mohamed El-Toni Mohammad Abdulaziz Alduraibi |
| author_sort | Joselito Puzon Labis |
| collection | DOAJ |
| description | In this paper, a unique hybrid approach to design and synthesize 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures by simultaneous deposition is presented. Pulsed laser deposition (PLD) and RF magnetron sputtering (RFMS) methods are redeveloped into a single tandem system to create a mixed-species plasma to grow ZnO nanostructures for gas sensing applications. In this set-up, the parameters of PLD have been optimized and explored with RFMS parameters to design 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures, including nanoneedles/nanospikes, nanowalls, and nanorods, among others. The RF power of magnetron system with Al<sub>2</sub>O<sub>3</sub> target is explored from 10 to 50 W, while the ZnO-loaded PLD’s laser fluence and background gases are optimized to simultaneously grow ZnO and Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures. The nanostructures are either grown via 2-step template approach, or by direct growth on Si (111) and MgO<0001> substrates. In this approach, a thin ZnO template/film was initially grown on the substrate by PLD at ~300 °C under ~10 milliTorr (1.3 Pa) O<sub>2</sub> background pressure, followed by growth of either ZnO or Al<sub>2</sub>O<sub>3</sub>-ZnO, using PLD and RFMS simultaneously under 0.1–0.5 Torr (13–67 Pa), and Ar or Ar/O<sub>2</sub> background in the substrate temperate range of 550–700 °C. Growth mechanisms are then proposed to explain the formation of Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures. The optimized parameters from PLD-RFMS are then used to grow nanostructures on Au-patterned Al<sub>2</sub>O<sub>3</sub>-based gas sensor to test its response to CO gas from 200 to 400 °C, and a good response is observed at ~350 °C. The grown ZnO and Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures are quite exceptional and remarkable and have potential applications in optoelectronics, such in bio/gas sensors. |
| first_indexed | 2024-03-11T04:40:08Z |
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| language | English |
| last_indexed | 2024-03-11T04:40:08Z |
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| spelling | doaj.art-34c01450629e4dea8eba9d26cae11c152023-11-17T20:43:10ZengMDPI AGNanomaterials2079-49912023-04-01138134510.3390/nano13081345Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing ApplicationsJoselito Puzon Labis0Hamad A. Albrithen1Mahmoud Hezam2Muhammad Ali Shar3Ahmad Algarni4Abdulaziz N. Alhazaa5Ahmed Mohamed El-Toni6Mohammad Abdulaziz Alduraibi7King Abdullah Institute for Nanotechnology, King Saud University, Riyadh 11451, Saudi ArabiaKing Abdullah Institute for Nanotechnology, King Saud University, Riyadh 11451, Saudi ArabiaKing Abdullah Institute for Nanotechnology, King Saud University, Riyadh 11451, Saudi ArabiaKing Abdullah Institute for Nanotechnology, King Saud University, Riyadh 11451, Saudi ArabiaDepartment of Physics and Astronomy, College of Science, King Saud University, Riyadh 11451, Saudi ArabiaKing Abdullah Institute for Nanotechnology, King Saud University, Riyadh 11451, Saudi ArabiaKing Abdullah Institute for Nanotechnology, King Saud University, Riyadh 11451, Saudi ArabiaDepartment of Physics and Astronomy, College of Science, King Saud University, Riyadh 11451, Saudi ArabiaIn this paper, a unique hybrid approach to design and synthesize 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures by simultaneous deposition is presented. Pulsed laser deposition (PLD) and RF magnetron sputtering (RFMS) methods are redeveloped into a single tandem system to create a mixed-species plasma to grow ZnO nanostructures for gas sensing applications. In this set-up, the parameters of PLD have been optimized and explored with RFMS parameters to design 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures, including nanoneedles/nanospikes, nanowalls, and nanorods, among others. The RF power of magnetron system with Al<sub>2</sub>O<sub>3</sub> target is explored from 10 to 50 W, while the ZnO-loaded PLD’s laser fluence and background gases are optimized to simultaneously grow ZnO and Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures. The nanostructures are either grown via 2-step template approach, or by direct growth on Si (111) and MgO<0001> substrates. In this approach, a thin ZnO template/film was initially grown on the substrate by PLD at ~300 °C under ~10 milliTorr (1.3 Pa) O<sub>2</sub> background pressure, followed by growth of either ZnO or Al<sub>2</sub>O<sub>3</sub>-ZnO, using PLD and RFMS simultaneously under 0.1–0.5 Torr (13–67 Pa), and Ar or Ar/O<sub>2</sub> background in the substrate temperate range of 550–700 °C. Growth mechanisms are then proposed to explain the formation of Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures. The optimized parameters from PLD-RFMS are then used to grow nanostructures on Au-patterned Al<sub>2</sub>O<sub>3</sub>-based gas sensor to test its response to CO gas from 200 to 400 °C, and a good response is observed at ~350 °C. The grown ZnO and Al<sub>2</sub>O<sub>3</sub>-ZnO nanostructures are quite exceptional and remarkable and have potential applications in optoelectronics, such in bio/gas sensors.https://www.mdpi.com/2079-4991/13/8/1345zinc oxidealuminum oxidepulsed laser depositionlaser ablationradio-frequency magnetron sputtering |
| spellingShingle | Joselito Puzon Labis Hamad A. Albrithen Mahmoud Hezam Muhammad Ali Shar Ahmad Algarni Abdulaziz N. Alhazaa Ahmed Mohamed El-Toni Mohammad Abdulaziz Alduraibi Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications Nanomaterials zinc oxide aluminum oxide pulsed laser deposition laser ablation radio-frequency magnetron sputtering |
| title | Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications |
| title_full | Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications |
| title_fullStr | Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications |
| title_full_unstemmed | Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications |
| title_short | Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al<sub>2</sub>O<sub>3</sub>-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications |
| title_sort | optimization of pulsed laser ablation and radio frequency sputtering tandem system for synthesis of 2d 3d al sub 2 sub o sub 3 sub zno nanostructures a hybrid approach to synthesis of nanostructures for gas sensing applications |
| topic | zinc oxide aluminum oxide pulsed laser deposition laser ablation radio-frequency magnetron sputtering |
| url | https://www.mdpi.com/2079-4991/13/8/1345 |
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