Transparent and Flexible Capacitors with an Ultrathin Structure by Using Graphene as Bottom Electrodes

Transparent and Flexible Capacitors with an Ultrathin Structure by Using Graphene as Bottom Electrodes

Ultrathin, transparent and flexible capacitors using graphene as the bottom electrodes were directly fabricated on polyethylene naphthalate (PEN) substrates. ZrO2 dielectric films were deposited on the treated surface of graphene by atomic layer deposition (ALD). The deposition process did not intro...

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Bibliographic Details
Main Authors: Tao Guo, Guozhen Zhang, Xi Su, Heng Zhang, Jiaxian Wan, Xue Chen, Hao Wu, Chang Liu
Format: Article
Language:English
Published: MDPI AG 2017-11-01
Series:Nanomaterials
Subjects:
transparent and flexible capacitors
graphene
ZrO2 films
atomic layer deposition
Online Access:https://www.mdpi.com/2079-4991/7/12/418

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