Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface
Utilizing the principle of laser-induced periodic surface structures (LIPSSs), this research delves into the morphological evolution of single-crystal silicon surfaces irradiated by a near-infrared picosecond laser through a scanning mode. With the increase in laser energy density, the nanostructure...
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| Format: | Article |
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MDPI AG
2024-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/2/200 |
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| author | Mengting Liu Baole Lu Jing Lv Jiang Wang Chen Li Guodong Zhang Jintao Bai Razvan Stoian Guanghua Cheng |
| author_facet | Mengting Liu Baole Lu Jing Lv Jiang Wang Chen Li Guodong Zhang Jintao Bai Razvan Stoian Guanghua Cheng |
| author_sort | Mengting Liu |
| collection | DOAJ |
| description | Utilizing the principle of laser-induced periodic surface structures (LIPSSs), this research delves into the morphological evolution of single-crystal silicon surfaces irradiated by a near-infrared picosecond laser through a scanning mode. With the increase in laser energy density, the nanostructure morphology on single-crystal silicon surfaces induced by incident lasers with different polarization directions sequentially produces high spatial-frequency LIPSSs (HSFLs) with a period of 220 nm ± 10 nm parallel to the laser polarization, low spatial-frequency LIPSSs (LSFLs) with a period of 770 nm ± 85 nm perpendicular to the direction of the polarization, and groove structures. Furthermore, by varying the angle between the laser polarization and the scanning direction, the study examined the combined anisotropic effects of the laser polarization scanning direction angle and the laser polarization crystal orientation angle on the genesis of LIPSSs on single-crystal silicon (100) surfaces. The experiments revealed polarization-related anisotropic characteristics in the morphology of HSFLs. It was found that when the polarization angle approached 45°, the regularity of the LSFLs deteriorated, the modification width decreased, and the periodicity increased. This is critical for the precise control of the LSFLs’ morphology. |
| first_indexed | 2024-03-07T22:20:38Z |
| format | Article |
| id | doaj.art-35cf329cfefe4eceaefe900a44f72af9 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-07T22:20:38Z |
| publishDate | 2024-01-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj.art-35cf329cfefe4eceaefe900a44f72af92024-02-23T15:27:35ZengMDPI AGMicromachines2072-666X2024-01-0115220010.3390/mi15020200Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon SurfaceMengting Liu0Baole Lu1Jing Lv2Jiang Wang3Chen Li4Guodong Zhang5Jintao Bai6Razvan Stoian7Guanghua Cheng8Institute of Photonics & Photon Technology, Northwest University, Xi’an 710127, ChinaInstitute of Photonics & Photon Technology, Northwest University, Xi’an 710127, ChinaSchool of Artificial Intelligence, Optics and Electronics (iOPEN), Northwestern Polytechnical University, Xi’an 710072, ChinaSchool of Artificial Intelligence, Optics and Electronics (iOPEN), Northwestern Polytechnical University, Xi’an 710072, ChinaCollege of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi’an 710021, ChinaSchool of Artificial Intelligence, Optics and Electronics (iOPEN), Northwestern Polytechnical University, Xi’an 710072, ChinaInstitute of Photonics & Photon Technology, Northwest University, Xi’an 710127, ChinaLaboratoire Hubert Curien, UMR 5516 CNRS, Université Jean Monnet, 42000 Saint Etienne, FranceSchool of Artificial Intelligence, Optics and Electronics (iOPEN), Northwestern Polytechnical University, Xi’an 710072, ChinaUtilizing the principle of laser-induced periodic surface structures (LIPSSs), this research delves into the morphological evolution of single-crystal silicon surfaces irradiated by a near-infrared picosecond laser through a scanning mode. With the increase in laser energy density, the nanostructure morphology on single-crystal silicon surfaces induced by incident lasers with different polarization directions sequentially produces high spatial-frequency LIPSSs (HSFLs) with a period of 220 nm ± 10 nm parallel to the laser polarization, low spatial-frequency LIPSSs (LSFLs) with a period of 770 nm ± 85 nm perpendicular to the direction of the polarization, and groove structures. Furthermore, by varying the angle between the laser polarization and the scanning direction, the study examined the combined anisotropic effects of the laser polarization scanning direction angle and the laser polarization crystal orientation angle on the genesis of LIPSSs on single-crystal silicon (100) surfaces. The experiments revealed polarization-related anisotropic characteristics in the morphology of HSFLs. It was found that when the polarization angle approached 45°, the regularity of the LSFLs deteriorated, the modification width decreased, and the periodicity increased. This is critical for the precise control of the LSFLs’ morphology.https://www.mdpi.com/2072-666X/15/2/200LIPSSspicosecond laserpolarization-dependent anisotropy |
| spellingShingle | Mengting Liu Baole Lu Jing Lv Jiang Wang Chen Li Guodong Zhang Jintao Bai Razvan Stoian Guanghua Cheng Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface Micromachines LIPSSs picosecond laser polarization-dependent anisotropy |
| title | Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface |
| title_full | Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface |
| title_fullStr | Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface |
| title_full_unstemmed | Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface |
| title_short | Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface |
| title_sort | polarization dependent anisotropy of lipsss morphology evolution on a single crystal silicon surface |
| topic | LIPSSs picosecond laser polarization-dependent anisotropy |
| url | https://www.mdpi.com/2072-666X/15/2/200 |
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