Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control
This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanome...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-08-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/21/17/5862 |
| _version_ | 1797520801621082112 |
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| author | Ingo Ortlepp Jaqueline Stauffenberg Eberhard Manske |
| author_facet | Ingo Ortlepp Jaqueline Stauffenberg Eberhard Manske |
| author_sort | Ingo Ortlepp |
| collection | DOAJ |
| description | This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanometre range with an atomic force microscope and the large range of motion of the NFM-100, structures can be analysed with high resolution and precision over large areas by combining the two systems, which was not possible before. On the basis of a grating sample, line scans over lengths in the millimetre range are demonstrated on the one hand; on the other hand, the accuracy as well as various evaluation methods are discussed and analysed. |
| first_indexed | 2024-03-10T08:03:45Z |
| format | Article |
| id | doaj.art-363c54b89cd5475a9523956c3779beba |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T08:03:45Z |
| publishDate | 2021-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-363c54b89cd5475a9523956c3779beba2023-11-22T11:13:34ZengMDPI AGSensors1424-82202021-08-012117586210.3390/s21175862Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality ControlIngo Ortlepp0Jaqueline Stauffenberg1Eberhard Manske2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, GermanyInstitute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, GermanyInstitute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, GermanyThis paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanometre range with an atomic force microscope and the large range of motion of the NFM-100, structures can be analysed with high resolution and precision over large areas by combining the two systems, which was not possible before. On the basis of a grating sample, line scans over lengths in the millimetre range are demonstrated on the one hand; on the other hand, the accuracy as well as various evaluation methods are discussed and analysed.https://www.mdpi.com/1424-8220/21/17/5862long-range AFM scansplanar nanopositioningnanofabrication machineactive microcantilevers |
| spellingShingle | Ingo Ortlepp Jaqueline Stauffenberg Eberhard Manske Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control Sensors long-range AFM scans planar nanopositioning nanofabrication machine active microcantilevers |
| title | Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control |
| title_full | Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control |
| title_fullStr | Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control |
| title_full_unstemmed | Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control |
| title_short | Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control |
| title_sort | processing and analysis of long range scans with an atomic force microscope afm in combination with nanopositioning and nanomeasuring technology for defect detection and quality control |
| topic | long-range AFM scans planar nanopositioning nanofabrication machine active microcantilevers |
| url | https://www.mdpi.com/1424-8220/21/17/5862 |
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