Electrical glow discharges and plasma parameter of planar sputtering system for silver target
DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar. The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters. The b...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
University of Baghdad
2018-09-01
|
| Series: | Iraqi Journal of Physics |
| Subjects: | |
| Online Access: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/77 |
| _version_ | 1797871287482187776 |
|---|---|
| author | Mazin H. Hasan |
| author_facet | Mazin H. Hasan |
| author_sort | Mazin H. Hasan |
| collection | DOAJ |
| description |
DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar. The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters. The breakdown voltage is a product of the Argon gas pressure inside the chamber and gab distance between the electrodes, represent as Paschen curve. The Current-voltage characteristics curves indicate that the electrical discharge plasma is working in the abnormal glow region. Plasma parameters were found from the current-voltage characteristics of a single probe positioned at the inter-cathode space. Typical values of the electron temperature and the electron density are in the range of (2.93 –5.3) eV and (10-16 -10-17) m-3 respectively.
|
| first_indexed | 2024-04-10T00:41:34Z |
| format | Article |
| id | doaj.art-36c17ab318ff46a69713fdd5e6581679 |
| institution | Directory Open Access Journal |
| issn | 2070-4003 2664-5548 |
| language | English |
| last_indexed | 2024-04-10T00:41:34Z |
| publishDate | 2018-09-01 |
| publisher | University of Baghdad |
| record_format | Article |
| series | Iraqi Journal of Physics |
| spelling | doaj.art-36c17ab318ff46a69713fdd5e65816792023-03-14T05:43:46ZengUniversity of BaghdadIraqi Journal of Physics2070-40032664-55482018-09-01163710.30723/ijp.v16i37.77Electrical glow discharges and plasma parameter of planar sputtering system for silver targetMazin H. Hasan DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar. The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters. The breakdown voltage is a product of the Argon gas pressure inside the chamber and gab distance between the electrodes, represent as Paschen curve. The Current-voltage characteristics curves indicate that the electrical discharge plasma is working in the abnormal glow region. Plasma parameters were found from the current-voltage characteristics of a single probe positioned at the inter-cathode space. Typical values of the electron temperature and the electron density are in the range of (2.93 –5.3) eV and (10-16 -10-17) m-3 respectively. https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/77Silver target, glow discharge, plasma parameter, dc sputtering. |
| spellingShingle | Mazin H. Hasan Electrical glow discharges and plasma parameter of planar sputtering system for silver target Iraqi Journal of Physics Silver target, glow discharge, plasma parameter, dc sputtering. |
| title | Electrical glow discharges and plasma parameter of planar sputtering system for silver target |
| title_full | Electrical glow discharges and plasma parameter of planar sputtering system for silver target |
| title_fullStr | Electrical glow discharges and plasma parameter of planar sputtering system for silver target |
| title_full_unstemmed | Electrical glow discharges and plasma parameter of planar sputtering system for silver target |
| title_short | Electrical glow discharges and plasma parameter of planar sputtering system for silver target |
| title_sort | electrical glow discharges and plasma parameter of planar sputtering system for silver target |
| topic | Silver target, glow discharge, plasma parameter, dc sputtering. |
| url | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/77 |
| work_keys_str_mv | AT mazinhhasan electricalglowdischargesandplasmaparameterofplanarsputteringsystemforsilvertarget |