Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films
(TiZrNbTa)Nx films were fabricated at various nitrogen flow ratios (RN2) through reactive direct current magnetron co-sputtering. The structural, mechanical, and anticorrosive properties of the (TiZrNbTa)Nx films were explored. The metallic TiZrNbTa film formed a body-centered cubic phase, and the f...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-09-01
|
| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785423022998 |
| _version_ | 1797646638777368576 |
|---|---|
| author | Cheng-Yi Lai Yung-I Chen |
| author_facet | Cheng-Yi Lai Yung-I Chen |
| author_sort | Cheng-Yi Lai |
| collection | DOAJ |
| description | (TiZrNbTa)Nx films were fabricated at various nitrogen flow ratios (RN2) through reactive direct current magnetron co-sputtering. The structural, mechanical, and anticorrosive properties of the (TiZrNbTa)Nx films were explored. The metallic TiZrNbTa film formed a body-centered cubic phase, and the film (N05) deposited at RN2 = 5% exhibited a nanocrystalline structure consisting of close-packed hexagonal and face-centered cubic (FCC) phases. In contrast, the films prepared at RN2 > 10% demonstrated an FCC phase. The N05 film has hardness and elastic modulus of 23.5 and 220 GPa, respectively, the highest hardness and relatively lower elastic modules among the studied nitride films. Moreover, the N05 film has the highest polarization resistance of 198 kΩ·cm2 measured by the potentiodynamic polarization method. The chemical states of the (TiZrNbTa)Nx films were examined by X-ray photoelectron spectroscopy. |
| first_indexed | 2024-03-11T15:04:34Z |
| format | Article |
| id | doaj.art-373fc55c397d40aeb7c3459a7edcbd24 |
| institution | Directory Open Access Journal |
| issn | 2238-7854 |
| language | English |
| last_indexed | 2024-03-11T15:04:34Z |
| publishDate | 2023-09-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Journal of Materials Research and Technology |
| spelling | doaj.art-373fc55c397d40aeb7c3459a7edcbd242023-10-30T06:04:51ZengElsevierJournal of Materials Research and Technology2238-78542023-09-012683278336Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx filmsCheng-Yi Lai0Yung-I Chen1Department of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung, TaiwanDepartment of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung, Taiwan; Center of Excellence for Ocean Engineering, National Taiwan Ocean University, Keelung, Taiwan; Corresponding author. Department of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung, Taiwan.(TiZrNbTa)Nx films were fabricated at various nitrogen flow ratios (RN2) through reactive direct current magnetron co-sputtering. The structural, mechanical, and anticorrosive properties of the (TiZrNbTa)Nx films were explored. The metallic TiZrNbTa film formed a body-centered cubic phase, and the film (N05) deposited at RN2 = 5% exhibited a nanocrystalline structure consisting of close-packed hexagonal and face-centered cubic (FCC) phases. In contrast, the films prepared at RN2 > 10% demonstrated an FCC phase. The N05 film has hardness and elastic modulus of 23.5 and 220 GPa, respectively, the highest hardness and relatively lower elastic modules among the studied nitride films. Moreover, the N05 film has the highest polarization resistance of 198 kΩ·cm2 measured by the potentiodynamic polarization method. The chemical states of the (TiZrNbTa)Nx films were examined by X-ray photoelectron spectroscopy.http://www.sciencedirect.com/science/article/pii/S2238785423022998Anticorrosive propertiesCo-sputteringMechanical propertiesMedium-entropy alloysTransition metal nitride films |
| spellingShingle | Cheng-Yi Lai Yung-I Chen Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films Journal of Materials Research and Technology Anticorrosive properties Co-sputtering Mechanical properties Medium-entropy alloys Transition metal nitride films |
| title | Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films |
| title_full | Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films |
| title_fullStr | Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films |
| title_full_unstemmed | Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films |
| title_short | Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films |
| title_sort | structural mechanical and anticorrosive properties of tizrnbta nx films |
| topic | Anticorrosive properties Co-sputtering Mechanical properties Medium-entropy alloys Transition metal nitride films |
| url | http://www.sciencedirect.com/science/article/pii/S2238785423022998 |
| work_keys_str_mv | AT chengyilai structuralmechanicalandanticorrosivepropertiesoftizrnbtanxfilms AT yungichen structuralmechanicalandanticorrosivepropertiesoftizrnbtanxfilms |