Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films

(TiZrNbTa)Nx films were fabricated at various nitrogen flow ratios (RN2) through reactive direct current magnetron co-sputtering. The structural, mechanical, and anticorrosive properties of the (TiZrNbTa)Nx films were explored. The metallic TiZrNbTa film formed a body-centered cubic phase, and the f...

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Bibliographic Details
Main Authors: Cheng-Yi Lai, Yung-I Chen
Format: Article
Language:English
Published: Elsevier 2023-09-01
Series:Journal of Materials Research and Technology
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785423022998