Structural, mechanical, and anticorrosive properties of (TiZrNbTa)Nx films
(TiZrNbTa)Nx films were fabricated at various nitrogen flow ratios (RN2) through reactive direct current magnetron co-sputtering. The structural, mechanical, and anticorrosive properties of the (TiZrNbTa)Nx films were explored. The metallic TiZrNbTa film formed a body-centered cubic phase, and the f...
Main Authors: | Cheng-Yi Lai, Yung-I Chen |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2023-09-01
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Series: | Journal of Materials Research and Technology |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785423022998 |
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