A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding

A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding

We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker’s transformation principle....

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Bibliographic Details
Main Authors: Jia Qi, Wenbo Li, Wei Chu, Jianping Yu, Miao Wu, Youting Liang, Difeng Yin, Peng Wang, Zhenhua Wang, Min Wang, Ya Cheng
Format: Article
Language:English
Published: MDPI AG 2020-02-01
Series:Micromachines
Subjects:
ultrafast laser microfabrication
microfluidic
glass bonding
Online Access:https://www.mdpi.com/2072-666X/11/2/213
Description
Summary:We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker&#8217;s transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 &#215; 0.5 mm<sup>2</sup>, enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.
ISSN:2072-666X

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