Self-Calibration Technique with Lightweight Algorithm for Thermal Drift Compensation in MEMS Accelerometers

Self-Calibration Technique with Lightweight Algorithm for Thermal Drift Compensation in MEMS Accelerometers

Capacitive MEMS accelerometers have a high thermal sensitivity that drifts the output when subjected to changes in temperature. To improve their performance in applications with thermal variations, it is necessary to compensate for these effects. These drifts can be compensated using a lightweight a...

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Bibliographic Details
Main Authors: Javier Martínez, David Asiain, José Ramón Beltrán
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Micromachines
Subjects:
MEMS
accelerometer
thermal drift
thermal compensation
calibration technique
Online Access:https://www.mdpi.com/2072-666X/13/4/584

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