Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating
This paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to h...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-07-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/13/3748 |
| _version_ | 1827604928177111040 |
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| author | Sang Hoon Lee Sangyoon Lee |
| author_facet | Sang Hoon Lee Sangyoon Lee |
| author_sort | Sang Hoon Lee |
| collection | DOAJ |
| description | This paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to have a six layers structure with an air gap. Fabrication of the air gap and cantilever was enabled by coating and removing water-soluble PVA. The bottom electrode, the dielectric layer, and the sacrificial layer were formed using the roll-to-roll slot-die coating technique. The spacer, the top electrode, and the structural layer were formed by spin coating. Several kinds of experiments were conducted for characterization of the fabricated sensor samples. Experimental results show that accelerations of up to 3.6 g can be sensed with an average sensitivity of 0.00856 %/g. |
| first_indexed | 2024-03-09T06:10:12Z |
| format | Article |
| id | doaj.art-3775e13233654ddcade8f75026231816 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T06:10:12Z |
| publishDate | 2020-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-3775e13233654ddcade8f750262318162023-12-03T11:58:31ZengMDPI AGSensors1424-82202020-07-012013374810.3390/s20133748Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die CoatingSang Hoon Lee0Sangyoon Lee1Department of Mechanical Design and Production Engineering, Konkuk University, Seoul 05029, KoreaDepartment of Mechanical Engineering, Konkuk University, Seoul 05029, KoreaThis paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to have a six layers structure with an air gap. Fabrication of the air gap and cantilever was enabled by coating and removing water-soluble PVA. The bottom electrode, the dielectric layer, and the sacrificial layer were formed using the roll-to-roll slot-die coating technique. The spacer, the top electrode, and the structural layer were formed by spin coating. Several kinds of experiments were conducted for characterization of the fabricated sensor samples. Experimental results show that accelerations of up to 3.6 g can be sensed with an average sensitivity of 0.00856 %/g.https://www.mdpi.com/1424-8220/20/13/3748acceleration sensorcantileverroll-to-roll slot-die coatingair gapsacrificial layer |
| spellingShingle | Sang Hoon Lee Sangyoon Lee Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating Sensors acceleration sensor cantilever roll-to-roll slot-die coating air gap sacrificial layer |
| title | Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating |
| title_full | Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating |
| title_fullStr | Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating |
| title_full_unstemmed | Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating |
| title_short | Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating |
| title_sort | cantilever type acceleration sensors made by roll to roll slot die coating |
| topic | acceleration sensor cantilever roll-to-roll slot-die coating air gap sacrificial layer |
| url | https://www.mdpi.com/1424-8220/20/13/3748 |
| work_keys_str_mv | AT sanghoonlee cantilevertypeaccelerationsensorsmadebyrolltorollslotdiecoating AT sangyoonlee cantilevertypeaccelerationsensorsmadebyrolltorollslotdiecoating |