Application of Maximum Entropy Method to Semiconductor Engineering
The maximum entropy method (MEM) is widely used in research fields such as linguistics, meteorology, physics, and chemistry. Recently, MEM application has become a subject of interest in the semiconductor engineering field, in which devices utilize very thin films composed of many materials. For thi...
Main Author: | Yoshiki Yonamoto |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2013-05-01
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Series: | Entropy |
Subjects: | |
Online Access: | http://www.mdpi.com/1099-4300/15/5/1663 |
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