Application of Maximum Entropy Method to Semiconductor Engineering

Application of Maximum Entropy Method to Semiconductor Engineering

The maximum entropy method (MEM) is widely used in research fields such as linguistics, meteorology, physics, and chemistry. Recently, MEM application has become a subject of interest in the semiconductor engineering field, in which devices utilize very thin films composed of many materials. For thi...

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Bibliographic Details
Main Author: Yoshiki Yonamoto
Format: Article
Language:English
Published: MDPI AG 2013-05-01
Series:Entropy
Subjects:
maximum entropy method
semiconductor engineering
film structure
fixed charge
trap
Online Access:http://www.mdpi.com/1099-4300/15/5/1663

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