Enhanced Infrared Absorbance of the CMOS Compatible Thermopile by the Subwavelength Rectangular-Hole Arrays

Enhanced Infrared Absorbance of the CMOS Compatible Thermopile by the Subwavelength Rectangular-Hole Arrays

The enhanced infrared absorbance (IRA) of the complementary metal-oxide-semiconductor (CMOS) compatible thermopile with the subwavelength rectangular-hole arrays in active area is investigated. The finite-difference time-domain (FDTD) method considered and analyzed the matrix arrangement (MA) and st...

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Bibliographic Details
Main Authors: Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Sensors
Subjects:
subwavelength
subwavelength hole arrays
subwavelength rectangular-hole arrays
thermopile
CMOS-MEMS
infrared radiation
Online Access:https://www.mdpi.com/1424-8220/20/11/3218

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