Metrological atomic force microscope for calibrating nano-scale step height standards
In this paper, we described a metrological AFM in order to calibrate step height standards used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement interferometers installed, related calibrated results are directly traceable to the SI of metre definition. The step heig...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
|
| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421000726 |
| Summary: | In this paper, we described a metrological AFM in order to calibrate step height standards used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement interferometers installed, related calibrated results are directly traceable to the SI of metre definition. The step height measurement accuracy was verified using several step heights up to 2000 nm. Corresponding measurement uncertainty in step height standard calibration was estimated in line with the Guide to the Expression of Uncertainty in Measurement (GUM). The expanded measurement uncertainty (k = 2) was better than 2.5 nm over a full range of up to 2000 nm. This suggests that the developed metrology system is capable of conducting nano-scale metrological standard calibration which is applicable to disseminating accuracy and traceability to commercial AFMs and optical microscopes in application of surface topography measurement. |
|---|---|
| ISSN: | 2665-9174 |