Metrological atomic force microscope for calibrating nano-scale step height standards
In this paper, we described a metrological AFM in order to calibrate step height standards used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement interferometers installed, related calibrated results are directly traceable to the SI of metre definition. The step heig...
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| Format: | Article |
| Language: | English |
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Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421000726 |
| _version_ | 1818693972814462976 |
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| author | Shihua Wang |
| author_facet | Shihua Wang |
| author_sort | Shihua Wang |
| collection | DOAJ |
| description | In this paper, we described a metrological AFM in order to calibrate step height standards used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement interferometers installed, related calibrated results are directly traceable to the SI of metre definition. The step height measurement accuracy was verified using several step heights up to 2000 nm. Corresponding measurement uncertainty in step height standard calibration was estimated in line with the Guide to the Expression of Uncertainty in Measurement (GUM). The expanded measurement uncertainty (k = 2) was better than 2.5 nm over a full range of up to 2000 nm. This suggests that the developed metrology system is capable of conducting nano-scale metrological standard calibration which is applicable to disseminating accuracy and traceability to commercial AFMs and optical microscopes in application of surface topography measurement. |
| first_indexed | 2024-12-17T13:22:11Z |
| format | Article |
| id | doaj.art-3832a6ea9bd046c4a9f2083dd842ae03 |
| institution | Directory Open Access Journal |
| issn | 2665-9174 |
| language | English |
| last_indexed | 2024-12-17T13:22:11Z |
| publishDate | 2021-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Measurement: Sensors |
| spelling | doaj.art-3832a6ea9bd046c4a9f2083dd842ae032022-12-21T21:46:50ZengElsevierMeasurement: Sensors2665-91742021-12-0118100109Metrological atomic force microscope for calibrating nano-scale step height standardsShihua Wang0National Metrology Centre, Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, 138634, SingaporeIn this paper, we described a metrological AFM in order to calibrate step height standards used as transfer artefacts for commercial AFMs. With X, Y and Z axes laser displacement interferometers installed, related calibrated results are directly traceable to the SI of metre definition. The step height measurement accuracy was verified using several step heights up to 2000 nm. Corresponding measurement uncertainty in step height standard calibration was estimated in line with the Guide to the Expression of Uncertainty in Measurement (GUM). The expanded measurement uncertainty (k = 2) was better than 2.5 nm over a full range of up to 2000 nm. This suggests that the developed metrology system is capable of conducting nano-scale metrological standard calibration which is applicable to disseminating accuracy and traceability to commercial AFMs and optical microscopes in application of surface topography measurement.http://www.sciencedirect.com/science/article/pii/S2665917421000726He-Ne laser Displacement interferometerAtomic force microscope (AFM)Nano-scale step height standardsMeasurement uncertainty analysis |
| spellingShingle | Shihua Wang Metrological atomic force microscope for calibrating nano-scale step height standards Measurement: Sensors He-Ne laser Displacement interferometer Atomic force microscope (AFM) Nano-scale step height standards Measurement uncertainty analysis |
| title | Metrological atomic force microscope for calibrating nano-scale step height standards |
| title_full | Metrological atomic force microscope for calibrating nano-scale step height standards |
| title_fullStr | Metrological atomic force microscope for calibrating nano-scale step height standards |
| title_full_unstemmed | Metrological atomic force microscope for calibrating nano-scale step height standards |
| title_short | Metrological atomic force microscope for calibrating nano-scale step height standards |
| title_sort | metrological atomic force microscope for calibrating nano scale step height standards |
| topic | He-Ne laser Displacement interferometer Atomic force microscope (AFM) Nano-scale step height standards Measurement uncertainty analysis |
| url | http://www.sciencedirect.com/science/article/pii/S2665917421000726 |
| work_keys_str_mv | AT shihuawang metrologicalatomicforcemicroscopeforcalibratingnanoscalestepheightstandards |