The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface
Differences in the values of adhesive forces of interaction between the probe tip of an atomic force microscope and the cleaned surfaces of silicon wafers during their treatment with isopropyl alcohol and distilled water were investigated experimentally. It was shown that the presence of water molec...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Samara National Research University
2019-06-01
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| Series: | Компьютерная оптика |
| Subjects: | |
| Online Access: | http://computeroptics.smr.ru/KO/PDF/KO43-3/430320.pdf |
| _version_ | 1818962994028085248 |
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| author | Igor Mikheev Faat Vakhitov |
| author_facet | Igor Mikheev Faat Vakhitov |
| author_sort | Igor Mikheev |
| collection | DOAJ |
| description | Differences in the values of adhesive forces of interaction between the probe tip of an atomic force microscope and the cleaned surfaces of silicon wafers during their treatment with isopropyl alcohol and distilled water were investigated experimentally. It was shown that the presence of water molecules on the surface of the substrates leads to a significant (approximately 5 times) change in the value of these forces. It was found that the use of AFM allows the relative magnitude of friction forces in small areas of silicon wafer surfaces to be estimated. |
| first_indexed | 2024-12-20T12:38:09Z |
| format | Article |
| id | doaj.art-38412b6baf2f4fb3a130554b91bc8e90 |
| institution | Directory Open Access Journal |
| issn | 0134-2452 2412-6179 |
| language | English |
| last_indexed | 2024-12-20T12:38:09Z |
| publishDate | 2019-06-01 |
| publisher | Samara National Research University |
| record_format | Article |
| series | Компьютерная оптика |
| spelling | doaj.art-38412b6baf2f4fb3a130554b91bc8e902022-12-21T19:40:34ZengSamara National Research UniversityКомпьютерная оптика0134-24522412-61792019-06-0143350751110.18287/2412-6179-2019-43-3-507-511The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surfaceIgor Mikheev 0Faat Vakhitov1Kazan National Research Technical University n.a. A.N. Tupolev – KAI, Kazan, RussiaKazan National Research Technical University n.a. A.N. Tupolev – KAI, Kazan, RussiaDifferences in the values of adhesive forces of interaction between the probe tip of an atomic force microscope and the cleaned surfaces of silicon wafers during their treatment with isopropyl alcohol and distilled water were investigated experimentally. It was shown that the presence of water molecules on the surface of the substrates leads to a significant (approximately 5 times) change in the value of these forces. It was found that the use of AFM allows the relative magnitude of friction forces in small areas of silicon wafer surfaces to be estimated.http://computeroptics.smr.ru/KO/PDF/KO43-3/430320.pdfatomic force microscopysilicon waferstribometric properties |
| spellingShingle | Igor Mikheev Faat Vakhitov The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface Компьютерная оптика atomic force microscopy silicon wafers tribometric properties |
| title | The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface |
| title_full | The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface |
| title_fullStr | The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface |
| title_full_unstemmed | The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface |
| title_short | The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface |
| title_sort | use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface |
| topic | atomic force microscopy silicon wafers tribometric properties |
| url | http://computeroptics.smr.ru/KO/PDF/KO43-3/430320.pdf |
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