Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films
Solid solution MAX phases in the Ti–Zr–Al–C system are investigated by sputter-deposition from elemental (Al, C) and alloy (Ti:Zr 50:50) targets. The effect of substrate temperature in the range 850 °C–1000 °C and different Al target-power are discussed. Lower-temperature conditions yielded films...
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| Format: | Article |
| Language: | English |
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Elsevier
2021-03-01
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| Series: | Results in Materials |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590048X20301011 |
| _version_ | 1818619161442516992 |
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| author | Clio Azina Per Eklund |
| author_facet | Clio Azina Per Eklund |
| author_sort | Clio Azina |
| collection | DOAJ |
| description | Solid solution MAX phases in the Ti–Zr–Al–C system are investigated by sputter-deposition from elemental (Al, C) and alloy (Ti:Zr 50:50) targets. The effect of substrate temperature in the range 850 °C–1000 °C and different Al target-power are discussed. Lower-temperature conditions yielded films mainly composed of carbide and aluminide phases, (Ti,Zr)C and Al3Zr(Ti), while temperatures ≥ 950 °C resulted in (Ti,Zr)2AlC MAX-phase-containing films. |
| first_indexed | 2024-12-16T17:33:05Z |
| format | Article |
| id | doaj.art-386041875f884830aa6dfa1490f60c32 |
| institution | Directory Open Access Journal |
| issn | 2590-048X |
| language | English |
| last_indexed | 2024-12-16T17:33:05Z |
| publishDate | 2021-03-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Results in Materials |
| spelling | doaj.art-386041875f884830aa6dfa1490f60c322022-12-21T22:22:52ZengElsevierResults in Materials2590-048X2021-03-019100159Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin filmsClio Azina0Per Eklund1Corresponding author.; Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping, SE-58183, SwedenThin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping, SE-58183, SwedenSolid solution MAX phases in the Ti–Zr–Al–C system are investigated by sputter-deposition from elemental (Al, C) and alloy (Ti:Zr 50:50) targets. The effect of substrate temperature in the range 850 °C–1000 °C and different Al target-power are discussed. Lower-temperature conditions yielded films mainly composed of carbide and aluminide phases, (Ti,Zr)C and Al3Zr(Ti), while temperatures ≥ 950 °C resulted in (Ti,Zr)2AlC MAX-phase-containing films.http://www.sciencedirect.com/science/article/pii/S2590048X20301011Magnetron sputteringMAX phaseSolid solutions |
| spellingShingle | Clio Azina Per Eklund Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films Results in Materials Magnetron sputtering MAX phase Solid solutions |
| title | Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films |
| title_full | Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films |
| title_fullStr | Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films |
| title_full_unstemmed | Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films |
| title_short | Effects of temperature and target power on the sputter-deposition of (Ti,Zr)n+1AlCn MAX-phase thin films |
| title_sort | effects of temperature and target power on the sputter deposition of ti zr n 1alcn max phase thin films |
| topic | Magnetron sputtering MAX phase Solid solutions |
| url | http://www.sciencedirect.com/science/article/pii/S2590048X20301011 |
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