Ion-Beam Synthesis of Gallium Oxide Nanocrystals in a SiO<sub>2</sub>/Si Dielectric Matrix

Ion-Beam Synthesis of Gallium Oxide Nanocrystals in a SiO<sub>2</sub>/Si Dielectric Matrix

A new method for creating nanomaterials based on gallium oxide by ion-beam synthesis of nanocrystals of this compound in a SiO<sub>2</sub>/Si dielectric matrix has been proposed. The influence of the order of irradiation with ions of phase-forming elements (gallium and oxygen) on the che...

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Bibliographic Details
Main Authors:	Dmitry S. Korolev, Kristina S. Matyunina, Alena A. Nikolskaya, Ruslan N. Kriukov, Alexey V. Nezhdanov, Alexey I. Belov, Alexey N. Mikhaylov, Artem A. Sushkov, Dmitry A. Pavlov, Pavel A. Yunin, Mikhail N. Drozdov, David I. Tetelbaum
Format:	Article
Language:	English
Published:	MDPI AG 2022-05-01
Series:	Nanomaterials
Subjects:	gallium oxide nanocrystals silicon oxide ion-beam synthesis ion implantation thermal annealing
Online Access:	https://www.mdpi.com/2079-4991/12/11/1840

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