Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

<p>Abstract</p> <p>Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched...

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Bibliographic Details
Main Authors: Zhou Jingfang, Tseng Ampere, Jiang Xiaohong, Wu Guoyun, Wang Shujie, Du Zuliang
Format: Article
Language:English
Published: SpringerOpen 2011-01-01
Series:Nanoscale Research Letters
Online Access:http://www.nanoscalereslett.com/content/6/1/518

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