Individuality of Dopants in Silicon Nano-pn Junctions

The reduced dimensionality of present electronic devices brings along changes in the dopant distribution in the device channel, in which only a small number of dopants exist. Recent studies demonstrated that individual dopants strongly affect the electrical characteristics of nanoscale transistors....

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Main Authors: Daniel MORARU, Sri PURWIYANTI, Roland NOWAK, Takeshi MIZUNO, Arief UDHIARTO, Djoko HARTANTO, Ryszard JABLONSKI, Michiharu TABE
Format: Article
Language:English
Published: Kaunas University of Technology 2014-06-01
Series:Medžiagotyra
Subjects:
Online Access:http://matsc.ktu.lt/index.php/MatSc/article/view/6312
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author Daniel MORARU
Sri PURWIYANTI
Roland NOWAK
Takeshi MIZUNO
Arief UDHIARTO
Djoko HARTANTO
Ryszard JABLONSKI
Michiharu TABE
author_facet Daniel MORARU
Sri PURWIYANTI
Roland NOWAK
Takeshi MIZUNO
Arief UDHIARTO
Djoko HARTANTO
Ryszard JABLONSKI
Michiharu TABE
author_sort Daniel MORARU
collection DOAJ
description The reduced dimensionality of present electronic devices brings along changes in the dopant distribution in the device channel, in which only a small number of dopants exist. Recent studies demonstrated that individual dopants strongly affect the electrical characteristics of nanoscale transistors. On the other hand, nanoscale pn junctions, building unit of more complex devices, have not been sufficiently studied from this viewpoint. In this work, we report several experiments that we carried out on nano-pn junctions in which the individuality of dopants is prominently observed. In electrical characteristics, we report, under various conditions, random telegraph signals (RTS) related to dopants as traps. The dynamic behavior of the depletion region of nano-pn junctions is also characterized by Kelvin probe force microscopy. <p>DOI: <a href="http://dx.doi.org/10.5755/j01.ms.20.2.6312">http://dx.doi.org/10.5755/j01.ms.20.2.6312</a></p>
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spelling doaj.art-389ee034654f4b5197595842f68010162022-12-22T01:56:45ZengKaunas University of TechnologyMedžiagotyra1392-13202029-72892014-06-0120212913110.5755/j01.ms.20.2.63123153Individuality of Dopants in Silicon Nano-pn JunctionsDaniel MORARU0Sri PURWIYANTI1Roland NOWAK2Takeshi MIZUNO3Arief UDHIARTO4Djoko HARTANTO5Ryszard JABLONSKI6Michiharu TABE7Research Institute of Electronics, Shizuoka UniversityUniversity of IndonesiaUniversity of IndonesiaShizuoka UniversityUniversity of IndonesiaUniversity of IndonesiaWarsaw University of TechnologyShizuoka UniversityThe reduced dimensionality of present electronic devices brings along changes in the dopant distribution in the device channel, in which only a small number of dopants exist. Recent studies demonstrated that individual dopants strongly affect the electrical characteristics of nanoscale transistors. On the other hand, nanoscale pn junctions, building unit of more complex devices, have not been sufficiently studied from this viewpoint. In this work, we report several experiments that we carried out on nano-pn junctions in which the individuality of dopants is prominently observed. In electrical characteristics, we report, under various conditions, random telegraph signals (RTS) related to dopants as traps. The dynamic behavior of the depletion region of nano-pn junctions is also characterized by Kelvin probe force microscopy. <p>DOI: <a href="http://dx.doi.org/10.5755/j01.ms.20.2.6312">http://dx.doi.org/10.5755/j01.ms.20.2.6312</a></p>http://matsc.ktu.lt/index.php/MatSc/article/view/6312individual dopantpn junctionnanoscalesilicon-on-insulatorrandom telegraph signal
spellingShingle Daniel MORARU
Sri PURWIYANTI
Roland NOWAK
Takeshi MIZUNO
Arief UDHIARTO
Djoko HARTANTO
Ryszard JABLONSKI
Michiharu TABE
Individuality of Dopants in Silicon Nano-pn Junctions
Medžiagotyra
individual dopant
pn junction
nanoscale
silicon-on-insulator
random telegraph signal
title Individuality of Dopants in Silicon Nano-pn Junctions
title_full Individuality of Dopants in Silicon Nano-pn Junctions
title_fullStr Individuality of Dopants in Silicon Nano-pn Junctions
title_full_unstemmed Individuality of Dopants in Silicon Nano-pn Junctions
title_short Individuality of Dopants in Silicon Nano-pn Junctions
title_sort individuality of dopants in silicon nano pn junctions
topic individual dopant
pn junction
nanoscale
silicon-on-insulator
random telegraph signal
url http://matsc.ktu.lt/index.php/MatSc/article/view/6312
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AT takeshimizuno individualityofdopantsinsiliconnanopnjunctions
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AT djokohartanto individualityofdopantsinsiliconnanopnjunctions
AT ryszardjablonski individualityofdopantsinsiliconnanopnjunctions
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