KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING
Improvement of repeatability and reliability of semiconductor wafers properties monitoring with a probe charge-sensitive methods is achieved by realization of Kelvin probe self-calibration mode using a wafer’s surface itself as a reference sample. Results of wafer surface scanning are visualized in...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2015-03-01
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| Series: | Pribory i Metody Izmerenij |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/79 |
| _version_ | 1797874874055655424 |
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| author | R. I. Vorobey O. K. Gusev A. L. Zharin A. N. Petlitsky V. A. Pilipenko A. S. Turtsevitch A. K. Tyavlovsky |
| author_facet | R. I. Vorobey O. K. Gusev A. L. Zharin A. N. Petlitsky V. A. Pilipenko A. S. Turtsevitch A. K. Tyavlovsky |
| author_sort | R. I. Vorobey |
| collection | DOAJ |
| description | Improvement of repeatability and reliability of semiconductor wafers properties monitoring with a probe charge-sensitive methods is achieved by realization of Kelvin probe self-calibration mode using a wafer’s surface itself as a reference sample. Results of wafer surface scanning are visualized in the form of parameter distribution color map. A method of measurements based on Kelvin probe self-calibration mode is realized in a measurement installation for non-destructive non-contact monitoring of semiconductor wafer defects. Method can be used to define defects’ physical properties including minority carrier diffusion length and lifetime, trapped charge density and energy distribution etc. |
| first_indexed | 2024-04-10T01:37:53Z |
| format | Article |
| id | doaj.art-38a20cde371b4a58bbf54567f9b67bb8 |
| institution | Directory Open Access Journal |
| issn | 2220-9506 2414-0473 |
| language | English |
| last_indexed | 2024-04-10T01:37:53Z |
| publishDate | 2015-03-01 |
| publisher | Belarusian National Technical University |
| record_format | Article |
| series | Pribory i Metody Izmerenij |
| spelling | doaj.art-38a20cde371b4a58bbf54567f9b67bb82023-03-13T09:14:45ZengBelarusian National Technical UniversityPribory i Metody Izmerenij2220-95062414-04732015-03-0102465271KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORINGR. I. Vorobey0O. K. Gusev1A. L. Zharin2A. N. Petlitsky3V. A. Pilipenko4A. S. Turtsevitch5A. K. Tyavlovsky6Белорусский национальный технический университетБелорусский национальный технический университетБелорусский национальный технический университет«Интеграл» – управляющая компания холдинга «ИНТЕГРАЛ», г. Минск«Интеграл» – управляющая компания холдинга «ИНТЕГРАЛ», г. Минск«Интеграл» – управляющая компания холдинга «ИНТЕГРАЛ», г. МинскБелорусский национальный технический университетImprovement of repeatability and reliability of semiconductor wafers properties monitoring with a probe charge-sensitive methods is achieved by realization of Kelvin probe self-calibration mode using a wafer’s surface itself as a reference sample. Results of wafer surface scanning are visualized in the form of parameter distribution color map. A method of measurements based on Kelvin probe self-calibration mode is realized in a measurement installation for non-destructive non-contact monitoring of semiconductor wafer defects. Method can be used to define defects’ physical properties including minority carrier diffusion length and lifetime, trapped charge density and energy distribution etc.https://pimi.bntu.by/jour/article/view/79: неразрушающий контрользонд кельвинаполупроводниковая пластинадефекты поверхностивизуализация потенциала поверхности |
| spellingShingle | R. I. Vorobey O. K. Gusev A. L. Zharin A. N. Petlitsky V. A. Pilipenko A. S. Turtsevitch A. K. Tyavlovsky KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING Pribory i Metody Izmerenij : неразрушающий контроль зонд кельвина полупроводниковая пластина дефекты поверхности визуализация потенциала поверхности |
| title | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_full | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_fullStr | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_full_unstemmed | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_short | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_sort | kelvin probe self calibration mode for semiconductor wafers properties monitoring |
| topic | : неразрушающий контроль зонд кельвина полупроводниковая пластина дефекты поверхности визуализация потенциала поверхности |
| url | https://pimi.bntu.by/jour/article/view/79 |
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