KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING
Improvement of repeatability and reliability of semiconductor wafers properties monitoring with a probe charge-sensitive methods is achieved by realization of Kelvin probe self-calibration mode using a wafer’s surface itself as a reference sample. Results of wafer surface scanning are visualized in...
Main Authors: | R. I. Vorobey, O. K. Gusev, A. L. Zharin, A. N. Petlitsky, V. A. Pilipenko, A. S. Turtsevitch, A. K. Tyavlovsky |
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Format: | Article |
Language: | English |
Published: |
Belarusian National Technical University
2015-03-01
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Series: | Pribory i Metody Izmerenij |
Subjects: | |
Online Access: | https://pimi.bntu.by/jour/article/view/79 |
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