Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator
In order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/11/1338 |
| _version_ | 1797509286593560576 |
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| author | Jiangong Cui Yaxin Yu Xiaoxia Chu Rongyu Zhao Min Zhu Wendong Zhang Guojun Zhang |
| author_facet | Jiangong Cui Yaxin Yu Xiaoxia Chu Rongyu Zhao Min Zhu Wendong Zhang Guojun Zhang |
| author_sort | Jiangong Cui |
| collection | DOAJ |
| description | In order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element method are used to analyze the optical characteristics of a grooved microring resonator, and the size of the sensor is optimized. The theoretical analysis results show that, when the bending radius reaches 10 μm, the theoretical quality factor is about 10<sup>6</sup>, the sensitivity is 3.14 mV/Pa, and the 3 dB bandwidth is 430 MHz, which is three orders of magnitude larger based on the sensitivity of the silicon-based cascaded resonator acoustic sensor. The sensor exhibits high sensitivity and can be used in hydrophones. The small size of the sensor also shows its potential application in the field of array integration. |
| first_indexed | 2024-03-10T05:15:36Z |
| format | Article |
| id | doaj.art-38b5cf9723444eb084b2f4927975df02 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T05:15:36Z |
| publishDate | 2021-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-38b5cf9723444eb084b2f4927975df022023-11-23T00:26:01ZengMDPI AGMicromachines2072-666X2021-10-011211133810.3390/mi12111338Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring ResonatorJiangong Cui0Yaxin Yu1Xiaoxia Chu2Rongyu Zhao3Min Zhu4Wendong Zhang5Guojun Zhang6State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaIn order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element method are used to analyze the optical characteristics of a grooved microring resonator, and the size of the sensor is optimized. The theoretical analysis results show that, when the bending radius reaches 10 μm, the theoretical quality factor is about 10<sup>6</sup>, the sensitivity is 3.14 mV/Pa, and the 3 dB bandwidth is 430 MHz, which is three orders of magnitude larger based on the sensitivity of the silicon-based cascaded resonator acoustic sensor. The sensor exhibits high sensitivity and can be used in hydrophones. The small size of the sensor also shows its potential application in the field of array integration.https://www.mdpi.com/2072-666X/12/11/1338grooved waveguidephotoacoustic couplingbroadbandacoustic sensor |
| spellingShingle | Jiangong Cui Yaxin Yu Xiaoxia Chu Rongyu Zhao Min Zhu Wendong Zhang Guojun Zhang Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator Micromachines grooved waveguide photoacoustic coupling broadband acoustic sensor |
| title | Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator |
| title_full | Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator |
| title_fullStr | Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator |
| title_full_unstemmed | Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator |
| title_short | Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator |
| title_sort | research on characteristics of broadband acoustic sensor based on silicon based grooved microring resonator |
| topic | grooved waveguide photoacoustic coupling broadband acoustic sensor |
| url | https://www.mdpi.com/2072-666X/12/11/1338 |
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