Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection
This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-08-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/23/17/7465 |
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| author | Balaadithya Uppalapati Durga Gajula Manav Bava Lavanya Muthusamy Goutam Koley |
| author_facet | Balaadithya Uppalapati Durga Gajula Manav Bava Lavanya Muthusamy Goutam Koley |
| author_sort | Balaadithya Uppalapati |
| collection | DOAJ |
| description | This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than other parts under applied voltage bias. The sensor response was found to vary linearly with airflow rate when tested over a range of airflow varying from 16 to 2000 sccm. The noise-limited flow volume measurement yielded ~4 sccm resolution, while the velocity resolution was found to be 0.241 cm/s, which is one of the best reported so far for thermal sensors. The sensor was able to operate at a very low power consumption level of ~5 mW, which is one of the lowest reported for these types of sensors. The intrinsic response time of the sensor was estimated to be on the order of a few ms, limited by its thermal properties. Overall, the microcantilever sensor, with its simple geometry and measurement configurations, was found to exhibit attractive performance metrics useful for various sensing applications. |
| first_indexed | 2024-03-10T23:13:11Z |
| format | Article |
| id | doaj.art-39745910175e45e089188b08a86f844d |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T23:13:11Z |
| publishDate | 2023-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-39745910175e45e089188b08a86f844d2023-11-19T08:50:15ZengMDPI AGSensors1424-82202023-08-012317746510.3390/s23177465Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow DetectionBalaadithya Uppalapati0Durga Gajula1Manav Bava2Lavanya Muthusamy3Goutam Koley4Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634, USASchool of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USADepartment of Physics and Astronomy, Clemson University, Clemson, SC 29634, USAHolcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634, USAHolcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634, USAThis paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than other parts under applied voltage bias. The sensor response was found to vary linearly with airflow rate when tested over a range of airflow varying from 16 to 2000 sccm. The noise-limited flow volume measurement yielded ~4 sccm resolution, while the velocity resolution was found to be 0.241 cm/s, which is one of the best reported so far for thermal sensors. The sensor was able to operate at a very low power consumption level of ~5 mW, which is one of the lowest reported for these types of sensors. The intrinsic response time of the sensor was estimated to be on the order of a few ms, limited by its thermal properties. Overall, the microcantilever sensor, with its simple geometry and measurement configurations, was found to exhibit attractive performance metrics useful for various sensing applications.https://www.mdpi.com/1424-8220/23/17/7465MEMSAlGaN/GaNtwo-dimensional electron gasmicrocantilever heaterairflow detection |
| spellingShingle | Balaadithya Uppalapati Durga Gajula Manav Bava Lavanya Muthusamy Goutam Koley Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection Sensors MEMS AlGaN/GaN two-dimensional electron gas microcantilever heater airflow detection |
| title | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
| title_full | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
| title_fullStr | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
| title_full_unstemmed | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
| title_short | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
| title_sort | low power algan gan triangular microcantilever for air flow detection |
| topic | MEMS AlGaN/GaN two-dimensional electron gas microcantilever heater airflow detection |
| url | https://www.mdpi.com/1424-8220/23/17/7465 |
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