Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method
The performance of the actuator is becoming increasingly important in the ultra-precision stage. However, the traditional Lorentz motors with given mechanical parameters cannot provide enough force for the next-generation motion stage in the semiconductor industry since they achieve a physical limit...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2022-08-01
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| Series: | Frontiers in Energy Research |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fenrg.2022.949782/full |
| _version_ | 1818483778286256128 |
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| author | Qian Miao Yang Liu Jiu Bin Tan |
| author_facet | Qian Miao Yang Liu Jiu Bin Tan |
| author_sort | Qian Miao |
| collection | DOAJ |
| description | The performance of the actuator is becoming increasingly important in the ultra-precision stage. However, the traditional Lorentz motors with given mechanical parameters cannot provide enough force for the next-generation motion stage in the semiconductor industry since they achieve a physical limit of power factor. To tackle this problem, this study develops a novel-driven approach and its control strategy for high-dynamic stages. Explicitly, the proposed method utilizes a linear reluctance motor as an actuator, which could promote the continuous thrust significantly. A heuristic optimization-based Bouc–Wen model is established to describe the nonlinear behavior of the novel actuator. Also, a flux control algorithm based on the integral sliding mode is derived and adjusted for precision thrust generation. Comparative simulations on a specific linear reluctance motor confirm the effectiveness and superiority of the proposed method and show that it has the ability to conquer the force nonlinearity of the novel actuator. |
| first_indexed | 2024-12-10T15:46:27Z |
| format | Article |
| id | doaj.art-39913792f4344788b4ace36ddada96c0 |
| institution | Directory Open Access Journal |
| issn | 2296-598X |
| language | English |
| last_indexed | 2024-12-10T15:46:27Z |
| publishDate | 2022-08-01 |
| publisher | Frontiers Media S.A. |
| record_format | Article |
| series | Frontiers in Energy Research |
| spelling | doaj.art-39913792f4344788b4ace36ddada96c02022-12-22T01:42:56ZengFrontiers Media S.A.Frontiers in Energy Research2296-598X2022-08-011010.3389/fenrg.2022.949782949782Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode MethodQian MiaoYang LiuJiu Bin TanThe performance of the actuator is becoming increasingly important in the ultra-precision stage. However, the traditional Lorentz motors with given mechanical parameters cannot provide enough force for the next-generation motion stage in the semiconductor industry since they achieve a physical limit of power factor. To tackle this problem, this study develops a novel-driven approach and its control strategy for high-dynamic stages. Explicitly, the proposed method utilizes a linear reluctance motor as an actuator, which could promote the continuous thrust significantly. A heuristic optimization-based Bouc–Wen model is established to describe the nonlinear behavior of the novel actuator. Also, a flux control algorithm based on the integral sliding mode is derived and adjusted for precision thrust generation. Comparative simulations on a specific linear reluctance motor confirm the effectiveness and superiority of the proposed method and show that it has the ability to conquer the force nonlinearity of the novel actuator.https://www.frontiersin.org/articles/10.3389/fenrg.2022.949782/fullreluctance actuatorBouc–Wen modelflux controlintegral sliding mode controlTLBO (teaching–learning-based optimization) |
| spellingShingle | Qian Miao Yang Liu Jiu Bin Tan Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method Frontiers in Energy Research reluctance actuator Bouc–Wen model flux control integral sliding mode control TLBO (teaching–learning-based optimization) |
| title | Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method |
| title_full | Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method |
| title_fullStr | Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method |
| title_full_unstemmed | Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method |
| title_short | Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method |
| title_sort | precision flux control of linear reluctance actuator using the integral sliding mode method |
| topic | reluctance actuator Bouc–Wen model flux control integral sliding mode control TLBO (teaching–learning-based optimization) |
| url | https://www.frontiersin.org/articles/10.3389/fenrg.2022.949782/full |
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