Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method
The performance of the actuator is becoming increasingly important in the ultra-precision stage. However, the traditional Lorentz motors with given mechanical parameters cannot provide enough force for the next-generation motion stage in the semiconductor industry since they achieve a physical limit...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-08-01
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| Series: | Frontiers in Energy Research |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fenrg.2022.949782/full |