Thermal Stability and High-Temperature Tribological Properties of a-C:H and Si-DLC Deposited by Microwave Sheath Voltage Combination Plasma

Thermal Stability and High-Temperature Tribological Properties of a-C:H and Si-DLC Deposited by Microwave Sheath Voltage Combination Plasma

In this study, amorphous hydrogenated carbon (a-C:H) and Si-doped diamond-like carbon (Si-DLC) films were prepared using microwave sheath voltage combination plasma (MVP) deposition. The thermal stability of the a-C:H and Si-DLC films were investigated by performing an annealing test (100-700&de...

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Bibliographic Details
Main Authors: Xingrui Deng, Hiroyuki Kousaka, Takayuki Tokoroyama, Noritsugu Umehara
Format: Article
Language:English
Published: Japanese Society of Tribologists 2013-09-01
Series:Tribology Online
Subjects:
diamond-like carbon
microwave sheath voltage combination plasma
thermal stability
in situ high-temperature tribological properties
Online Access:https://www.jstage.jst.go.jp/article/trol/8/4/8_257/_pdf/-char/en

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