Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates

Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates

We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and tran...

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Bibliographic Details
Main Authors: Tianning Liu, Ajay Dangi, Jeong Nyeon Kim, Sri-Rajasekhar Kothapalli, Kyusun Choi, Susan Trolier-McKinstry, Thomas Jackson
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Sensors
Subjects:
flexible transducer
PZT pMUT
thin-film transducer
flexible PZT
flexible pMUT
solution-cast polyimide
Online Access:https://www.mdpi.com/1424-8220/21/3/1014

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