Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz
The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor po...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/2/280 |
| _version_ | 1797619222557229056 |
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| author | Yi-Fei Zhang Min Cui Dong-Ping Wu |
| author_facet | Yi-Fei Zhang Min Cui Dong-Ping Wu |
| author_sort | Yi-Fei Zhang |
| collection | DOAJ |
| description | The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor points. The micromachine characteristics of the filter could be optimized to change the center frequency from 8.5 to 12 GHz by improving the geometrical parameters; other electrical parameters of the filter, such as stopband rejection, insertion loss, and return loss at each center frequency, were simulated and calculated. In order to evaluate the MEMS filter design methodology, a filter working at 10.5 GHz fabricated with an aluminum top electrode was used, and it displayed a low insertion loss of 1.12 dB and a high stopband rejection of 28.3 dB. Compared with the simulation results, these proposed filter showed better electrical performance. Our results demonstrated that the filter with the integrated RF MEMS switch not only provides the benefit of reduced size compared with a traditional filter, but also improves stopband rejection, insertion loss, and return loss. |
| first_indexed | 2024-03-11T08:24:59Z |
| format | Article |
| id | doaj.art-3a49f5cfef4f4a0fa56005a515d1f9b0 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T08:24:59Z |
| publishDate | 2023-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-3a49f5cfef4f4a0fa56005a515d1f9b02023-11-16T22:10:02ZengMDPI AGMicromachines2072-666X2023-01-0114228010.3390/mi14020280Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHzYi-Fei Zhang0Min Cui1Dong-Ping Wu2State Key Laboratory of ASIC and System, Fudan University, Shanghai 200433, ChinaSchool of Instrument and Electronics, North University of China, Taiyuan 030051, ChinaState Key Laboratory of ASIC and System, Fudan University, Shanghai 200433, ChinaThe design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor points. The micromachine characteristics of the filter could be optimized to change the center frequency from 8.5 to 12 GHz by improving the geometrical parameters; other electrical parameters of the filter, such as stopband rejection, insertion loss, and return loss at each center frequency, were simulated and calculated. In order to evaluate the MEMS filter design methodology, a filter working at 10.5 GHz fabricated with an aluminum top electrode was used, and it displayed a low insertion loss of 1.12 dB and a high stopband rejection of 28.3 dB. Compared with the simulation results, these proposed filter showed better electrical performance. Our results demonstrated that the filter with the integrated RF MEMS switch not only provides the benefit of reduced size compared with a traditional filter, but also improves stopband rejection, insertion loss, and return loss.https://www.mdpi.com/2072-666X/14/2/280RF MEMS switchfilter |
| spellingShingle | Yi-Fei Zhang Min Cui Dong-Ping Wu Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz Micromachines RF MEMS switch filter |
| title | Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz |
| title_full | Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz |
| title_fullStr | Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz |
| title_full_unstemmed | Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz |
| title_short | Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz |
| title_sort | design and fabrication of a mems bandpass filter with different center frequency of 8 5 12 ghz |
| topic | RF MEMS switch filter |
| url | https://www.mdpi.com/2072-666X/14/2/280 |
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