Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress

In the last several decades, metal oxide thin films have attracted significant attention for the development of various existing and emerging technological applications, including pH sensors. The mandate for consistent and precise pH sensing techniques has been increasing across various fields, incl...

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Main Authors: Mohammad Nur-E-Alam, Devendra Kumar Maurya, Boon Kar Yap, Armin Rajabi, Camellia Doroody, Hassan Bin Mohamed, Mayeen Uddin Khandaker, Mohammad Aminul Islam, Sieh Kiong Tiong
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/19/8194
_version_ 1797575140266999808
author Mohammad Nur-E-Alam
Devendra Kumar Maurya
Boon Kar Yap
Armin Rajabi
Camellia Doroody
Hassan Bin Mohamed
Mayeen Uddin Khandaker
Mohammad Aminul Islam
Sieh Kiong Tiong
author_facet Mohammad Nur-E-Alam
Devendra Kumar Maurya
Boon Kar Yap
Armin Rajabi
Camellia Doroody
Hassan Bin Mohamed
Mayeen Uddin Khandaker
Mohammad Aminul Islam
Sieh Kiong Tiong
author_sort Mohammad Nur-E-Alam
collection DOAJ
description In the last several decades, metal oxide thin films have attracted significant attention for the development of various existing and emerging technological applications, including pH sensors. The mandate for consistent and precise pH sensing techniques has been increasing across various fields, including environmental monitoring, biotechnology, food and agricultural industries, and medical diagnostics. Metal oxide thin films grown using physical vapor deposition (PVD) with precise control over film thickness, composition, and morphology are beneficial for pH sensing applications such as enhancing pH sensitivity and stability, quicker response, repeatability, and compatibility with miniaturization. Various PVD techniques, including sputtering, evaporation, and ion beam deposition, used to fabricate thin films for tailoring materials’ properties for the advanced design and development of high-performing pH sensors, have been explored worldwide by many research groups. In addition, various thin film materials have also been investigated, including metal oxides, nitrides, and nanostructured films, to make very robust pH sensing electrodes with higher pH sensing performance. The development of novel materials and structures has enabled higher sensitivity, improved selectivity, and enhanced durability in harsh pH environments. The last decade has witnessed significant advancements in PVD thin films for pH sensing applications. The combination of precise film deposition techniques, novel materials, and surface functionalization strategies has led to improved pH sensing performance, making PVD thin films a promising choice for future pH sensing technologies.
first_indexed 2024-03-10T21:34:18Z
format Article
id doaj.art-3accd03388994525b42921b307bfd2d6
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-03-10T21:34:18Z
publishDate 2023-09-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-3accd03388994525b42921b307bfd2d62023-11-19T15:04:03ZengMDPI AGSensors1424-82202023-09-012319819410.3390/s23198194Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research ProgressMohammad Nur-E-Alam0Devendra Kumar Maurya1Boon Kar Yap2Armin Rajabi3Camellia Doroody4Hassan Bin Mohamed5Mayeen Uddin Khandaker6Mohammad Aminul Islam7Sieh Kiong Tiong8Institute of Sustainable Energy, Universiti Tenaga Nasional, Jalan IKRAM-UNITEN, Kajang 43000, Selangor, MalaysiaNational Centre for Flexible Electronics, Indian Institute of Technology Kanpur, Kanpur 208016, IndiaInstitute of Sustainable Energy, Universiti Tenaga Nasional, Jalan IKRAM-UNITEN, Kajang 43000, Selangor, MalaysiaInstitute of Sustainable Energy, Universiti Tenaga Nasional, Jalan IKRAM-UNITEN, Kajang 43000, Selangor, MalaysiaInstitute of Sustainable Energy, Universiti Tenaga Nasional, Jalan IKRAM-UNITEN, Kajang 43000, Selangor, MalaysiaInstitute of Sustainable Energy, Universiti Tenaga Nasional, Jalan IKRAM-UNITEN, Kajang 43000, Selangor, MalaysiaCentre for Applied Physics and Radiation Technologies, School of Engineering and Technology, Sunway University, Bandar Sunway 47500, Selangor, MalaysiaDepartment of Electrical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur 50603, Selangor, MalaysiaInstitute of Sustainable Energy, Universiti Tenaga Nasional, Jalan IKRAM-UNITEN, Kajang 43000, Selangor, MalaysiaIn the last several decades, metal oxide thin films have attracted significant attention for the development of various existing and emerging technological applications, including pH sensors. The mandate for consistent and precise pH sensing techniques has been increasing across various fields, including environmental monitoring, biotechnology, food and agricultural industries, and medical diagnostics. Metal oxide thin films grown using physical vapor deposition (PVD) with precise control over film thickness, composition, and morphology are beneficial for pH sensing applications such as enhancing pH sensitivity and stability, quicker response, repeatability, and compatibility with miniaturization. Various PVD techniques, including sputtering, evaporation, and ion beam deposition, used to fabricate thin films for tailoring materials’ properties for the advanced design and development of high-performing pH sensors, have been explored worldwide by many research groups. In addition, various thin film materials have also been investigated, including metal oxides, nitrides, and nanostructured films, to make very robust pH sensing electrodes with higher pH sensing performance. The development of novel materials and structures has enabled higher sensitivity, improved selectivity, and enhanced durability in harsh pH environments. The last decade has witnessed significant advancements in PVD thin films for pH sensing applications. The combination of precise film deposition techniques, novel materials, and surface functionalization strategies has led to improved pH sensing performance, making PVD thin films a promising choice for future pH sensing technologies.https://www.mdpi.com/1424-8220/23/19/8194thin filmmetal oxidepH sensorsensitivity
spellingShingle Mohammad Nur-E-Alam
Devendra Kumar Maurya
Boon Kar Yap
Armin Rajabi
Camellia Doroody
Hassan Bin Mohamed
Mayeen Uddin Khandaker
Mohammad Aminul Islam
Sieh Kiong Tiong
Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress
Sensors
thin film
metal oxide
pH sensor
sensitivity
title Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress
title_full Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress
title_fullStr Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress
title_full_unstemmed Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress
title_short Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress
title_sort physical vapor deposited metal oxide thin films for ph sensing applications last decade of research progress
topic thin film
metal oxide
pH sensor
sensitivity
url https://www.mdpi.com/1424-8220/23/19/8194
work_keys_str_mv AT mohammadnurealam physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress
AT devendrakumarmaurya physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress
AT boonkaryap physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress
AT arminrajabi physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress
AT camelliadoroody physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress
AT hassanbinmohamed physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress
AT mayeenuddinkhandaker physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress
AT mohammadaminulislam physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress
AT siehkiongtiong physicalvapordepositedmetaloxidethinfilmsforphsensingapplicationslastdecadeofresearchprogress