Development of a CMOS-Compatible Carbon Nanotube Array Transfer Method

Development of a CMOS-Compatible Carbon Nanotube Array Transfer Method

Carbon nanotubes (CNTs) have, over the years, been used in research as a promising material in electronics as a thermal interface material and as interconnects amongst other applications. However, there exist several issues preventing the widespread integration of CNTs onto device applications, e.g....

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Bibliographic Details
Main Authors: Chun Fei Siah, Lucas Yu Xiang Lum, Jianxiong Wang, Simon Chun Kiat Goh, Chong Wei Tan, Liangxing Hu, Philippe Coquet, Hong Li, Chuan Seng Tan, Beng Kang Tay
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
carbon nanotubes
microelectronics fabrication
bonding
temperature
Online Access:https://www.mdpi.com/2072-666X/12/1/95

Internet

https://www.mdpi.com/2072-666X/12/1/95

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