The use of reference marks for precise tip positioning in scanning probe microscopy

The article discusses techniques for the precise positioning of a probe tip on the surface under study in scanning probe microscopy. The precise tip positioning is of high importance when studying the same sample with various microscopes, probes, in various environments and conditions. It is offered...

Full description

Bibliographic Details
Main Author: P.V. Gulyaev
Format: Article
Language:English
Published: Samara National Research University 2020-06-01
Series:Компьютерная оптика
Subjects:
Online Access:http://computeroptics.smr.ru/KO/PDF/KO44-3/440313.pdf
_version_ 1811336874668589056
author P.V. Gulyaev
author_facet P.V. Gulyaev
author_sort P.V. Gulyaev
collection DOAJ
description The article discusses techniques for the precise positioning of a probe tip on the surface under study in scanning probe microscopy. The precise tip positioning is of high importance when studying the same sample with various microscopes, probes, in various environments and conditions. It is offered that the precise positioning should be done by applying on the surface equidistant reference marks with a nanoindentor along a straight line. The article describes a procedure for shifting the microscope’s field of view for detecting the reference marks and subsequently moving the probe along the marks line. A reference marks recognition algorithm is presented. The algorithm is based on the image correlation analysis using a master mark image and the subsequent extraction of special points (at local maxima of the correlation coefficient). A descriptor of mutual distances between the special points and the Pearson coefficient (аs a quantitative criterion of recognition) are used for recognition. Three types of reference marks are considered: a circle, a circle with gradient filling, and a circle with continuous filling. It is shown that the number of the allocated special points can be significantly larger than that of the reference marks. A method for filtering special points is offered. The method is based on the threshold filtering of special points using values of the correlation coefficient. The filtering consists in excluding those special points in whose neighborhood the difference of the maximum and minimum of the correlation coefficient does not exceed a preset threshold. Results confirming the effectiveness of the offered filtering method are presented. Recommendations for choosing the parameters of the recognition and filtering algorithms are given.
first_indexed 2024-04-13T17:46:47Z
format Article
id doaj.art-3b9ab0982cd34e029d7baa8f046ab3ea
institution Directory Open Access Journal
issn 0134-2452
2412-6179
language English
last_indexed 2024-04-13T17:46:47Z
publishDate 2020-06-01
publisher Samara National Research University
record_format Article
series Компьютерная оптика
spelling doaj.art-3b9ab0982cd34e029d7baa8f046ab3ea2022-12-22T02:36:56ZengSamara National Research UniversityКомпьютерная оптика0134-24522412-61792020-06-0144342042610.18287/2412-6179-CO-641The use of reference marks for precise tip positioning in scanning probe microscopyP.V. Gulyaev0Udmurt Research Center, Ural Branch of the Russian Academy of Sciences, Izhevsk, RussianThe article discusses techniques for the precise positioning of a probe tip on the surface under study in scanning probe microscopy. The precise tip positioning is of high importance when studying the same sample with various microscopes, probes, in various environments and conditions. It is offered that the precise positioning should be done by applying on the surface equidistant reference marks with a nanoindentor along a straight line. The article describes a procedure for shifting the microscope’s field of view for detecting the reference marks and subsequently moving the probe along the marks line. A reference marks recognition algorithm is presented. The algorithm is based on the image correlation analysis using a master mark image and the subsequent extraction of special points (at local maxima of the correlation coefficient). A descriptor of mutual distances between the special points and the Pearson coefficient (аs a quantitative criterion of recognition) are used for recognition. Three types of reference marks are considered: a circle, a circle with gradient filling, and a circle with continuous filling. It is shown that the number of the allocated special points can be significantly larger than that of the reference marks. A method for filtering special points is offered. The method is based on the threshold filtering of special points using values of the correlation coefficient. The filtering consists in excluding those special points in whose neighborhood the difference of the maximum and minimum of the correlation coefficient does not exceed a preset threshold. Results confirming the effectiveness of the offered filtering method are presented. Recommendations for choosing the parameters of the recognition and filtering algorithms are given.http://computeroptics.smr.ru/KO/PDF/KO44-3/440313.pdfscanning probe microscopycorrelation coefficientspecial pointmaster imagesreference markrecognition
spellingShingle P.V. Gulyaev
The use of reference marks for precise tip positioning in scanning probe microscopy
Компьютерная оптика
scanning probe microscopy
correlation coefficient
special point
master images
reference mark
recognition
title The use of reference marks for precise tip positioning in scanning probe microscopy
title_full The use of reference marks for precise tip positioning in scanning probe microscopy
title_fullStr The use of reference marks for precise tip positioning in scanning probe microscopy
title_full_unstemmed The use of reference marks for precise tip positioning in scanning probe microscopy
title_short The use of reference marks for precise tip positioning in scanning probe microscopy
title_sort use of reference marks for precise tip positioning in scanning probe microscopy
topic scanning probe microscopy
correlation coefficient
special point
master images
reference mark
recognition
url http://computeroptics.smr.ru/KO/PDF/KO44-3/440313.pdf
work_keys_str_mv AT pvgulyaev theuseofreferencemarksforprecisetippositioninginscanningprobemicroscopy
AT pvgulyaev useofreferencemarksforprecisetippositioninginscanningprobemicroscopy