AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing
The properties of H<sub>2</sub>S gas sensing were investigated using a ZnO nanostructure prepared with AZO (zinc oxide with aluminium) and Al surfaces which were developed on a MEMS (Micro Electromechanical System) device. Hydrothermal synthesis was implemented for the deposition of the...
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MDPI AG
2021-12-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/11/12/3377 |
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| author | Yempati Nagarjuna Jun-Cong Lin Sheng-Chang Wang Wen-Tse Hsiao Yu-Jen Hsiao |
| author_facet | Yempati Nagarjuna Jun-Cong Lin Sheng-Chang Wang Wen-Tse Hsiao Yu-Jen Hsiao |
| author_sort | Yempati Nagarjuna |
| collection | DOAJ |
| description | The properties of H<sub>2</sub>S gas sensing were investigated using a ZnO nanostructure prepared with AZO (zinc oxide with aluminium) and Al surfaces which were developed on a MEMS (Micro Electromechanical System) device. Hydrothermal synthesis was implemented for the deposition of the ZnO nanostructure. To find the optimal conditions for H<sub>2</sub>S gas sensing, different ZnO growth times and different temperatures were considered and tested, and the results were analysed. At 250 °C and 90 min growth time, a ZnO sensor prepared with AZO and 40 nm Al recorded an 8.5% H<sub>2</sub>S gas-sensing response at a 200 ppb gas concentration and a 14% sensing response at a gas concentration of 1000 ppb. The dominant sensing response provided the optimal conditions for the ZnO sensor, which were 250 °C temperature and 90 min growth time. Gas sensor selectivity was tested with five different gases (CO, SO<sub>2</sub>, NO<sub>2</sub>, NH<sub>3</sub> and H<sub>2</sub>S) and the sensor showed great selectivity towards H<sub>2</sub>S gas. |
| first_indexed | 2024-03-10T03:26:10Z |
| format | Article |
| id | doaj.art-3c030774daaa4aff9761d737120f74b5 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-10T03:26:10Z |
| publishDate | 2021-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-3c030774daaa4aff9761d737120f74b52023-11-23T09:51:44ZengMDPI AGNanomaterials2079-49912021-12-011112337710.3390/nano11123377AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas SensingYempati Nagarjuna0Jun-Cong Lin1Sheng-Chang Wang2Wen-Tse Hsiao3Yu-Jen Hsiao4Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, TaiwanDepartment of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, TaiwanDepartment of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, TaiwanTaiwan Instrument Research Institute, National Applied Research Laboratories, 20 R&D Road VI, Hsinchu Science Park, Hsinchu City 300, TaiwanDepartment of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, TaiwanThe properties of H<sub>2</sub>S gas sensing were investigated using a ZnO nanostructure prepared with AZO (zinc oxide with aluminium) and Al surfaces which were developed on a MEMS (Micro Electromechanical System) device. Hydrothermal synthesis was implemented for the deposition of the ZnO nanostructure. To find the optimal conditions for H<sub>2</sub>S gas sensing, different ZnO growth times and different temperatures were considered and tested, and the results were analysed. At 250 °C and 90 min growth time, a ZnO sensor prepared with AZO and 40 nm Al recorded an 8.5% H<sub>2</sub>S gas-sensing response at a 200 ppb gas concentration and a 14% sensing response at a gas concentration of 1000 ppb. The dominant sensing response provided the optimal conditions for the ZnO sensor, which were 250 °C temperature and 90 min growth time. Gas sensor selectivity was tested with five different gases (CO, SO<sub>2</sub>, NO<sub>2</sub>, NH<sub>3</sub> and H<sub>2</sub>S) and the sensor showed great selectivity towards H<sub>2</sub>S gas.https://www.mdpi.com/2079-4991/11/12/3377H<sub>2</sub>S gas sensingZnO nanostructureMEMS deviceAZOgas selectivity |
| spellingShingle | Yempati Nagarjuna Jun-Cong Lin Sheng-Chang Wang Wen-Tse Hsiao Yu-Jen Hsiao AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing Nanomaterials H<sub>2</sub>S gas sensing ZnO nanostructure MEMS device AZO gas selectivity |
| title | AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing |
| title_full | AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing |
| title_fullStr | AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing |
| title_full_unstemmed | AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing |
| title_short | AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing |
| title_sort | azo based zno nanosheet mems sensor with different al concentrations for enhanced h sub 2 sub s gas sensing |
| topic | H<sub>2</sub>S gas sensing ZnO nanostructure MEMS device AZO gas selectivity |
| url | https://www.mdpi.com/2079-4991/11/12/3377 |
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