AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing

AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H<sub>2</sub>S Gas Sensing

The properties of H<sub>2</sub>S gas sensing were investigated using a ZnO nanostructure prepared with AZO (zinc oxide with aluminium) and Al surfaces which were developed on a MEMS (Micro Electromechanical System) device. Hydrothermal synthesis was implemented for the deposition of the...

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Bibliographic Details
Main Authors:	Yempati Nagarjuna, Jun-Cong Lin, Sheng-Chang Wang, Wen-Tse Hsiao, Yu-Jen Hsiao
Format:	Article
Language:	English
Published:	MDPI AG 2021-12-01
Series:	Nanomaterials
Subjects:	H<sub>2</sub>S gas sensing ZnO nanostructure MEMS device AZO gas selectivity
Online Access:	https://www.mdpi.com/2079-4991/11/12/3377

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