Mesopore Formation and Silicon Surface Nanostructuration by Metal-Assisted Chemical Etching With Silver Nanoparticles

Mesopore Formation and Silicon Surface Nanostructuration by Metal-Assisted Chemical Etching With Silver Nanoparticles

This article presents a study on Metal-Assisted Chemical Etching (MACE) of silicon in HF-H2O2 using silver nanoparticles as catalysts. Our aim is a better understanding of the process to elaborate new 3D submicrometric surface structures useful for light management. We investigated MACE over the who...

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Bibliographic Details
Main Authors: Elisa Pinna, Sylvain Le Gall, Encarnacion Torralba, Guido Mula, Christine Cachet-Vivier, Stéphane Bastide
Format: Article
Language:English
Published: Frontiers Media S.A. 2020-07-01
Series:Frontiers in Chemistry
Subjects:
MACE
silver nanoparticle
black silicon
reflectivity
texturization
nanostructuration
Online Access:https://www.frontiersin.org/article/10.3389/fchem.2020.00658/full

Internet

https://www.frontiersin.org/article/10.3389/fchem.2020.00658/full

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