Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method

Despite over 90 years of study on the emissive probe, a plasma diagnostic tool used to measure plasma potential, its underlying physics has yet to be fully understood. In this study, we investigated the voltages along the hot filament wire and emitting thermal electrons and proved which voltage refl...

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Main Authors: Chulhee Cho, Sijun Kim, Youngseok Lee, Inho Seong, Wonnyoung Jeong, Yebin You, Minsu Choi, Shinjae You
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/16/7/2762
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author Chulhee Cho
Sijun Kim
Youngseok Lee
Inho Seong
Wonnyoung Jeong
Yebin You
Minsu Choi
Shinjae You
author_facet Chulhee Cho
Sijun Kim
Youngseok Lee
Inho Seong
Wonnyoung Jeong
Yebin You
Minsu Choi
Shinjae You
author_sort Chulhee Cho
collection DOAJ
description Despite over 90 years of study on the emissive probe, a plasma diagnostic tool used to measure plasma potential, its underlying physics has yet to be fully understood. In this study, we investigated the voltages along the hot filament wire and emitting thermal electrons and proved which voltage reflects the plasma potential. Using a circuit model incorporating the floating condition, we found that the lowest potential on the plasma-exposed filament provides a close approximation of the plasma potential. This theoretical result was verified with a comparison of emissive probe measurements and Langmuir probe measurements in inductively coupled plasma. This work provides a significant contribution to the accurate measurement of plasma potential using the emissive probe with the floating potential method.
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spelling doaj.art-3c4c1867577448b883d73f9d14d3e1202023-11-17T17:04:44ZengMDPI AGMaterials1996-19442023-03-01167276210.3390/ma16072762Determination of Plasma Potential Using an Emissive Probe with Floating Potential MethodChulhee Cho0Sijun Kim1Youngseok Lee2Inho Seong3Wonnyoung Jeong4Yebin You5Minsu Choi6Shinjae You7Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of KoreaApplied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of KoreaApplied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of KoreaApplied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of KoreaApplied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of KoreaApplied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of KoreaApplied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of KoreaApplied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of KoreaDespite over 90 years of study on the emissive probe, a plasma diagnostic tool used to measure plasma potential, its underlying physics has yet to be fully understood. In this study, we investigated the voltages along the hot filament wire and emitting thermal electrons and proved which voltage reflects the plasma potential. Using a circuit model incorporating the floating condition, we found that the lowest potential on the plasma-exposed filament provides a close approximation of the plasma potential. This theoretical result was verified with a comparison of emissive probe measurements and Langmuir probe measurements in inductively coupled plasma. This work provides a significant contribution to the accurate measurement of plasma potential using the emissive probe with the floating potential method.https://www.mdpi.com/1996-1944/16/7/2762plasma diagnosticsplasma potentialemissive probefloating potential methodplasma potential determination
spellingShingle Chulhee Cho
Sijun Kim
Youngseok Lee
Inho Seong
Wonnyoung Jeong
Yebin You
Minsu Choi
Shinjae You
Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method
Materials
plasma diagnostics
plasma potential
emissive probe
floating potential method
plasma potential determination
title Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method
title_full Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method
title_fullStr Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method
title_full_unstemmed Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method
title_short Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method
title_sort determination of plasma potential using an emissive probe with floating potential method
topic plasma diagnostics
plasma potential
emissive probe
floating potential method
plasma potential determination
url https://www.mdpi.com/1996-1944/16/7/2762
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