Chemical Vapor Deposition of 4 Inch Wafer‐Scale Monolayer MoSe2

Chemical Vapor Deposition of 4 Inch Wafer‐Scale Monolayer MoSe2

2D semiconducting transition metal dichalcogenides (TMDs) are considered promising building blocks for emergent electronic and optoelectronic devices. As one of the representatives of 2D semiconductors, monolayer MoSe2 has excellent electrical and optical properties and has attracted a lot of resear...

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Bibliographic Details
Main Authors: Jiawei Li, Shuopei Wang, Lu Li, Zheng Wei, Qinqin Wang, Huacong Sun, Jinpeng Tian, Yutuo Guo, Jieying Liu, Hua Yu, Na Li, Gen Long, Xuedong Bai, Wei Yang, Rong Yang, Dongxia Shi, Guangyu Zhang
Format: Article
Language:English
Published: Wiley-VCH 2022-11-01
Series:Small Science
Subjects:
chemical vapor deposition
field-effect transistors
monolayer MoSe2
transition metal dichalcogenides
wafer-scale monolayers
Online Access:https://doi.org/10.1002/smsc.202200062

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