Heteronanostructural metal oxide-based gas microsensors
Abstract The development of high-performance, portable and miniaturized gas sensors has aroused increasing interest in the fields of environmental monitoring, security, medical diagnosis, and agriculture. Among different detection tools, metal oxide semiconductor (MOS)-based chemiresistive gas senso...
Main Authors: | Lin Liu, Yingyi Wang, Yinhang Liu, Shuqi Wang, Tie Li, Simin Feng, Sujie Qin, Ting Zhang |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2022-07-01
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Series: | Microsystems & Nanoengineering |
Online Access: | https://doi.org/10.1038/s41378-022-00410-1 |
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