Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone

Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone

In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor h...

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Bibliographic Details
Main Authors: Richard Hopper, Daniel Popa, Vasileios Tsoutsouras, Florin Udrea, Phillip Stanley-Marbell
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Proceedings
Subjects:
thermal acoustic
gas sensor
CMOS
MEMS
Online Access:https://www.mdpi.com/2504-3900/56/1/3

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