In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method

The radial error is an important parameter to evaluate the performance of ultra-precision spindles. The three-point method has not yet been well applied in nanometer-scale measurement due to its disadvantages of harmonic suppression and the complicated error separation process. In order to verify th...

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Main Authors: Hanwei Xu, Zizhou Sun, Yifan Dai, Chaoliang Guan, Hao Hu, Yu Wang
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/3/653
_version_ 1797610053786664960
author Hanwei Xu
Zizhou Sun
Yifan Dai
Chaoliang Guan
Hao Hu
Yu Wang
author_facet Hanwei Xu
Zizhou Sun
Yifan Dai
Chaoliang Guan
Hao Hu
Yu Wang
author_sort Hanwei Xu
collection DOAJ
description The radial error is an important parameter to evaluate the performance of ultra-precision spindles. The three-point method has not yet been well applied in nanometer-scale measurement due to its disadvantages of harmonic suppression and the complicated error separation process. In order to verify that the three-point method can realize the nanometer-scale measurement of the radial error in the machining environment, an in situ measurement and evaluation system is established. Experiments are performed using the system, and a comparative experiment is conducted to verify the accuracy of the system. The average value and standard deviation of the measurement results are 23.096 nm and 0.556 nm, respectively. The in situ measurement result was in good agreement with the Donaldson reversal method using a commercially available spindle analyzer.
first_indexed 2024-03-11T06:09:08Z
format Article
id doaj.art-3d8d9147dd3e42d89a7c283bc60ab1d5
institution Directory Open Access Journal
issn 2072-666X
language English
last_indexed 2024-03-11T06:09:08Z
publishDate 2023-03-01
publisher MDPI AG
record_format Article
series Micromachines
spelling doaj.art-3d8d9147dd3e42d89a7c283bc60ab1d52023-11-17T12:43:49ZengMDPI AGMicromachines2072-666X2023-03-0114365310.3390/mi14030653In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point MethodHanwei Xu0Zizhou Sun1Yifan Dai2Chaoliang Guan3Hao Hu4Yu Wang5College of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaThe radial error is an important parameter to evaluate the performance of ultra-precision spindles. The three-point method has not yet been well applied in nanometer-scale measurement due to its disadvantages of harmonic suppression and the complicated error separation process. In order to verify that the three-point method can realize the nanometer-scale measurement of the radial error in the machining environment, an in situ measurement and evaluation system is established. Experiments are performed using the system, and a comparative experiment is conducted to verify the accuracy of the system. The average value and standard deviation of the measurement results are 23.096 nm and 0.556 nm, respectively. The in situ measurement result was in good agreement with the Donaldson reversal method using a commercially available spindle analyzer.https://www.mdpi.com/2072-666X/14/3/653radial errorultra-precision spindlenanometer-scale measurementthree-point methodDonaldson reversal method
spellingShingle Hanwei Xu
Zizhou Sun
Yifan Dai
Chaoliang Guan
Hao Hu
Yu Wang
In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method
Micromachines
radial error
ultra-precision spindle
nanometer-scale measurement
three-point method
Donaldson reversal method
title In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method
title_full In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method
title_fullStr In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method
title_full_unstemmed In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method
title_short In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method
title_sort in situ measurement of spindle radial error for ultra precision machining based on three point method
topic radial error
ultra-precision spindle
nanometer-scale measurement
three-point method
Donaldson reversal method
url https://www.mdpi.com/2072-666X/14/3/653
work_keys_str_mv AT hanweixu insitumeasurementofspindleradialerrorforultraprecisionmachiningbasedonthreepointmethod
AT zizhousun insitumeasurementofspindleradialerrorforultraprecisionmachiningbasedonthreepointmethod
AT yifandai insitumeasurementofspindleradialerrorforultraprecisionmachiningbasedonthreepointmethod
AT chaoliangguan insitumeasurementofspindleradialerrorforultraprecisionmachiningbasedonthreepointmethod
AT haohu insitumeasurementofspindleradialerrorforultraprecisionmachiningbasedonthreepointmethod
AT yuwang insitumeasurementofspindleradialerrorforultraprecisionmachiningbasedonthreepointmethod