In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method
The radial error is an important parameter to evaluate the performance of ultra-precision spindles. The three-point method has not yet been well applied in nanometer-scale measurement due to its disadvantages of harmonic suppression and the complicated error separation process. In order to verify th...
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Format: | Article |
Language: | English |
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MDPI AG
2023-03-01
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Series: | Micromachines |
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Online Access: | https://www.mdpi.com/2072-666X/14/3/653 |
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author | Hanwei Xu Zizhou Sun Yifan Dai Chaoliang Guan Hao Hu Yu Wang |
author_facet | Hanwei Xu Zizhou Sun Yifan Dai Chaoliang Guan Hao Hu Yu Wang |
author_sort | Hanwei Xu |
collection | DOAJ |
description | The radial error is an important parameter to evaluate the performance of ultra-precision spindles. The three-point method has not yet been well applied in nanometer-scale measurement due to its disadvantages of harmonic suppression and the complicated error separation process. In order to verify that the three-point method can realize the nanometer-scale measurement of the radial error in the machining environment, an in situ measurement and evaluation system is established. Experiments are performed using the system, and a comparative experiment is conducted to verify the accuracy of the system. The average value and standard deviation of the measurement results are 23.096 nm and 0.556 nm, respectively. The in situ measurement result was in good agreement with the Donaldson reversal method using a commercially available spindle analyzer. |
first_indexed | 2024-03-11T06:09:08Z |
format | Article |
id | doaj.art-3d8d9147dd3e42d89a7c283bc60ab1d5 |
institution | Directory Open Access Journal |
issn | 2072-666X |
language | English |
last_indexed | 2024-03-11T06:09:08Z |
publishDate | 2023-03-01 |
publisher | MDPI AG |
record_format | Article |
series | Micromachines |
spelling | doaj.art-3d8d9147dd3e42d89a7c283bc60ab1d52023-11-17T12:43:49ZengMDPI AGMicromachines2072-666X2023-03-0114365310.3390/mi14030653In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point MethodHanwei Xu0Zizhou Sun1Yifan Dai2Chaoliang Guan3Hao Hu4Yu Wang5College of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, ChinaThe radial error is an important parameter to evaluate the performance of ultra-precision spindles. The three-point method has not yet been well applied in nanometer-scale measurement due to its disadvantages of harmonic suppression and the complicated error separation process. In order to verify that the three-point method can realize the nanometer-scale measurement of the radial error in the machining environment, an in situ measurement and evaluation system is established. Experiments are performed using the system, and a comparative experiment is conducted to verify the accuracy of the system. The average value and standard deviation of the measurement results are 23.096 nm and 0.556 nm, respectively. The in situ measurement result was in good agreement with the Donaldson reversal method using a commercially available spindle analyzer.https://www.mdpi.com/2072-666X/14/3/653radial errorultra-precision spindlenanometer-scale measurementthree-point methodDonaldson reversal method |
spellingShingle | Hanwei Xu Zizhou Sun Yifan Dai Chaoliang Guan Hao Hu Yu Wang In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method Micromachines radial error ultra-precision spindle nanometer-scale measurement three-point method Donaldson reversal method |
title | In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method |
title_full | In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method |
title_fullStr | In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method |
title_full_unstemmed | In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method |
title_short | In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method |
title_sort | in situ measurement of spindle radial error for ultra precision machining based on three point method |
topic | radial error ultra-precision spindle nanometer-scale measurement three-point method Donaldson reversal method |
url | https://www.mdpi.com/2072-666X/14/3/653 |
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