In Situ Measurement of Spindle Radial Error for Ultra-Precision Machining Based on Three-Point Method
The radial error is an important parameter to evaluate the performance of ultra-precision spindles. The three-point method has not yet been well applied in nanometer-scale measurement due to its disadvantages of harmonic suppression and the complicated error separation process. In order to verify th...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-03-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/3/653 |